1769-OF8V
步进电机的高极数使其能够产生高启动并在低速下平稳运行。它们可以快速响应,无需编码器即可准确定位,并轻松产生保持力矩。然而,由于高绕组电感、极数和 L/R 常数,在高速区域转矩会降低。 伺服电机的低极数和低绕组电感不会产生高启动扭矩,但可以使它们在整个速度范围内地保持扭矩。
闭环反馈
根据定义,伺服电机采用闭环控制运行,而步进电机通常采用开环控制运行。伺服电机使用反馈来控制电机的位置、速度或扭矩。步进电机被命令移动到特定位置而不需要反馈,但可能会因过载而失去同步。
添加反馈以保持同步确实使驱动器设计复杂化并增加了组件数量。除了来自典型步进电机系统的脉冲发生器、相序器和 FET 之外,伺服电机系统还包含转子位置计数器、F/V 转换器、电流放大器、速度放大器、位置放大器和偏差计数器。所有这些组件都需要在 PID 回路中运行电机,在 PID 回路中,驱动器不断计算误差并调整比例/积分/微分增益以进行实时校正。这就是伺服电机更昂贵且需要处理时间的原因。
KLA-Tencor SLX RF Bench Assy. 740-336864-001 working
KLA-Tencor 301 I-Line RF Bench 740-323100-002 working
KLA-Tencor 710-680976-002 EMC WIB2 Board New
KLA-Tencor Cobra Shipping Filter Assy 0107339-000 Used
KLA-Tencor SLX Objective Lens 760-334096-000 Untested
KLA-Tencor 395005 Tropel 14X CYL Telescope-1 AIT2 New
KLA-Tencor AIT UV COLL Side Polarizer 0024476-001 New
KLA-Tencor Retrofit Optics Beamsplitter 0099602-001 New
KLA-Tencor Lower Octopole/Wein Lens 780-14108-000
KLA-Tencor Lower Octopole/Wein Lens 780-14108-000
KLA-Tencor Cannon Box Magazine Assembly 740-060658-001
KLA Tencor 710-711754-00 Autofocus Board
KLA Tencor 710-711567-00 Communication interface II
KLA Tencor X/Y Interface 710-720011-01 Rev B6
KLA Tencor Sensor Buffer Board 710-710199-01
KLA Tencor Illumination Control 710-713250-01
KLA Tencor Cassette Controller Board 710-711879-01
KLA-Tencor SM300 (SpectraMap) Thin Film Mapping Tool
KLA-Tencor Wafer APS3 board AIT3 assy 546801 Rev: AC
COMDEL CPS SERIES RF GENERATOR KLA TENCOR POWER SUPPLY
KLA TENCOR XYI ASSY 710-610391-000/AB SN P841002056 REV
KLA-Tencor AIT APS Tower/Center Block 0071149-001 Used
KLA-Tencor AIT3XP APS NIC Tower 0034693-001 New
KLA Tencor MMD analog AIT UV 0021488-005 Rev. AA
KLA Tencor MMD analog AIT UV 0052196-007
KLA Tencor MMD analog AIT UV 0021488-004 Rev AA
KLA-Tencor Lower Octopole/Wein Lens 780-14108-000 Used
KLA-Tencor Lower Octopole/Wein Lens 780-14108-000 Used
JDS Uniphase 2214-30SLQT Laser KLA-Tencor E137025
KLA-Tencor AIT 2 GPIO Board 386065 working
KLA-Tencor Lid Lift Leg Assy. 781-11759-000 working
KLA-Tencor CIP XP Column Extension Assy. 0110157-000
KLA-Tencor 486i Controller 0020839 Rev.AA working
KLA-Tencor CRS2000 Olympus Microscope Turret BH3-5NRE-M
KLA-Tencor High Voltage Control Module 52-1081
KLA-Tencor AIT 2 PSF Driver Board 556661 working
KLA-Tencor AIT 2 4-Channel Motor Control Board 363251
KLA-Tencor AIT 2 4-Channel Motor Control 261408 working
KLA-Tencor AIT 2 U500 Control Board 690D1470 working
KLA-Tencor Quantox High Voltage Control Module 52-1081
KLA-Tencor 8100 200mm XY Stage 780-10480-001 working
KLA-Tencor CRS1010 Camera Lens Filter 002001
KLA-Tencor CRS1010 Lens Filter Assy. 000056 working
Olympus KLA-Tencor AIT Microscope Turret 0034223-000
Olympus KLA-Tencor AIT Microscope Turret 529737
KLA-Tencor 710-663106-001 Dual Stepper Driver 2 New
KLA-Tencor 2139 Flipper Autoloader Kit 780-689642-000
KLA-Tencor CRS1010 Camera Filter Assy. 000056 working
KLA-Tencor CRS1010 Lens Filter Assy. 002001 working
KLA-Tencor Glentek Electronics Analyzer 0045454-000
KLA-Tencor SLX RF Bench Assy. 740-336864-001 untested
KLA-Tencor Rotary Transfer Arm 720-07360-000
KLA-Tencor XP Objective Lens 0110155-000 Untested
KLA-Tencor Newport AIT3 Mask Changer 556190 New
KLA-Tencor Laser Mod 0124593-000 New
KLA-Tencor AIT UV Laser Servo Detector 0099586-001 New
KLA Tencor PFE 4K Mask SFS7500 ASSY 213780 REV D
KLA Tencor PN: 770-809195-000 Image Processor Board
KLA Tencor 710-710112-01 Mechanical Drive Board
KLA Tencor 710-710112-00 Mechanical Drive Board
KLA Tencor 710-710112-01 Mechanical Drive Board
KLA Tencor 710-710112-00 Mechanical Drive Board
KLA-Tencor GPIO assy: 0052412-001 Rev: AA
KLA Tencor robot DISTR AIT2 530352 P/N 0035531-000
KLA TENCOR FELL PROBE HEAD TYPE C 50-0002-03
KLA-Tencor Upper Housing Assy. 781-21332-000 working