A06B-6150-H075驱动器

A06B-6150-H075驱动器

A06B-6150-H075驱动器

A06B-6150-H075驱动器

用于典型的带分流二极管的栅时，24VDC时，每ON点现场大额定功率为350mW

2.大输入触发率可以使I/O诊断正常地运行，探测出所有正常地可测出的故障。小触发率给出一故障覆盖率，可以覆盖在模件的计算出的平均故障间隔时间，（MTBF）的百分之十以内的正常不可探测到的故障。

3. VIN是作用於得电点的电压。输出电压是指在整个故障诊断周期内，非常明显地作用在一个邻近的失电点上的电压。值得注意的是故障输出可能会错误地使设备的另一部分的并行输入得电。

图3-4 TMR高密度数字输入模件简图

型号:#3504E-24VDC或48VDC

TMR高密数字输入模件，24VDC或48VDC（#3504E型）

色标 暗红

输入点数 64共用的，DC耦合

输入电压范围1

24VDC 20～36VDC

48VDC 40～72VDC

输入超限保护 115VAC连续的；150VDC连续的

24VDC的开关电平

OFF到ON 15VDC，典型的；18VDC，坏；4VDC典型回差

ON到OFF 8VDC，典型；6VDC，坏；4VDC典型回差

开关电平，48VDC的

OFF到ON 27VDC，典型的；32VDC，坏；7VDC典型回差

ON到OFF 14VDC，典型，11VDC，坏，7VDC典型回差

输入延迟

OFF到ON <10ms

ON到OFF <10ms

状态指示灯

ON或OFF态 每点1个

模件状态 PASS,FAULT，ACTIVE

输入阻抗2 >3kΩ,额定

逻辑功率 <10瓦

输入诊断故障覆盖率3

Max输入触发率 每100ms一次

小输入触发率 不要求

故障诊断周期 每2-3秒1ms

输出电压 0VDC或5VDC，典型的

输出阻抗 100Kω，典型的

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6：ABB：工业机器人备件DSQC系列、Bailey INFI 90等。

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8：Motorola（摩托罗拉）：MVME 162、MVME 167、MVME1772、MVME177等系列。

9：XYCOM：I/O 、VME板和处理器等。

10：GE FANUC(GE发那科)：模块、卡件、驱动器等各类备件。

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13：Woodward（伍德沃德）：SPC阀位控制器、PEAK150数字控制器。

14:工业机器人系统备件。

AMAT P5000 MARK-II 200MM Nitride 3-CH

0-2-ANNEAL,76-135065-00 / SABRE XT ANNEAL FRONT END / NOVELLUS

Novellus Inova Next 300mm, PM Chamber, HCM CU A, NVLS Concept 3, INOVA NXT, PVD

Novellus Inova Next 300mm, PM Chamber, HCM TAN A, NVLS Concept 3, INOVA NXT, PVD

Novellus Inova Next 300mm, PM Chamber, HCM TAN B, NVLS Concept 3, INOVA NXT, PVD

Novellus Inova Next 300mm, PM Chamber, HCM CU A, NVLS Concept 3, INOVA NXT, PVD

Novellus/Lam 02-259925-00 Speed Dome 300mm Factory Refurbished

02-029514-01/LEFT INDEXER ASSY./NOVELLUS

02-029514-02/RIGHT INDEXER TYPE 2 ASSY./NOVELLUS

27-290521-00 / GENERATOR, PLASMA, 3.0KW, LITMAS, 1.9-3.2MHZ / NOVELLUS

Novellus Speed Load Lock Robot 02-053993-01

60-135046-00/ PUMP,DRY,EDWARDS IPX500 / NOVELLUS

27-255798-00N, 3152603-010 / E-WAVE POWER SUPPLY / NOVELLUS

27-135167-00, 3156024-143 /PDX 1400 LF GENERATOR, 350KHZ AE/ NOVELLUS

LEYBOLD  MAG 2000CT, MAG 2000C, Turbo Pump, Concept 3 , Novellus

02-162351-00 / ASSY,BELLJAR,HI PWR,C2SPD-S / NOVELLUS

Advanced Energy 3156024-141C,27-028379-00 /PDX 1400 RF GEN AE / NOVELLUS

5169 NOVELLUS ESC 200MM HDP MC TYPE 15-118976-00 REV F

5847 NOVELLUS 200MM ELECTROSTATIC CHUCK P/N:02-257120-00 15-255518-00

27-274809-00, 27-105447-00/GHW-85A,GEN,HF,ENI,8KW,GHW80A-13DF2L0-001 / NOVELLUS

02-258799-00 / ASSY,HEATER BLOCK,2&3KW,6FORKS,SEQUEL /NOVELLUS

02-00093-00 Novellus C1 One-Arm Robot Assembly Refurbishment Service + warranty

Novellus Porter  MFC-CU-A  TEOS Controller, 27-00198-00,Control, Module, LMFC,S6

Novellus Inova Next 300mm, EFEM, NVLS Concept 3, INOVA NXT, PVD

Novellus Inova Next 300mm, NVLS C3, PVD Rack, SCCU11, 02-2880001-01, SRD

Kit for NOVELLUS ALTUS Chamber Precleaned

02-00093-00 /C1 ROBOT W/EXCHANGE 70V / NOVELLUS

NOVELLUS Speed Chamber, 15-029544-00 REV C

MKS Astron Generator, AX7651 (Novellus FI20656-1)

Novellus, ASSY, C4D SIOC 1, V4.72, VECTOR, p/n 02-136534-00, 02-267698-00

19-00154-00 / HEATER BLK,2KW, 2KW 8 200MM, NON SLOTTED / NOVELLUS

7837 NOVELLUS SPEED DOME 200MM 02-162351-00

novellus 02-134763-00 Rev A 15-118976-00 Rev F CA68001502 KIT Retro duraket

novellus 05-134263-00 Kit retro duratek mc200 semi 15-118976-00 Rev F 1010791004

YASKAWA / NOVELLUS SYSTEMS YSC-02D04B02GS / 61-362412-00 NEW SURPLUS, MOTOR ASSY

NOVELLUS 02-307230-00 ASM, SESIOC ALTUS 2, IPC, ALTUS SIOC2 W/WN

Novellus Assy, MC3E Platform Controller with Ethernet

Novellus 02-253704-00 ASSY,MC3E MODULE CONTROLLER WITH ETHERNET

27-028234-00 /CNTRLR,INDXR ANIMATICS CONTROLLER / NOVELLUS

27-00196-00/ PL-2HF-11451-55 RF ENI POWER SUPPLY/ NOVELLUS

Advanced Energy AE 3150273-005, RF Match, Mercury 10013, Novellus. 417121

ANIMATICS Motion Controller  CDP2407    NOVELLUS P/N 27-028234-00

AE 3159273-005 Mercury 10013 RF Match, Novellus 27-256558-00, 408576

Novellus Inova Next 300mm, Affinity EWA-23DK-HE14CBD0, 900-34113-000, Chiller

7521 NOVELLUS VARIAN M2000 M2I 8INCH DE GAS TABLE WELDMENT W/ DE GA 04-717982-02

NOVELLUS 15-120948-00 CYLINDER,SOURCE,DFE

CARD-I/O, SIOC 0&1, 02-057949-00, ASM, ALTUS, SIOC FIELD CONNECTOR MODULE, ASSY

5829 NOVELLUS TOP LEVEL ELECTRO STATIC CHUCK 02-317623-00

Novellus Concept One 150mm Process Chamber ++ NICE ++

NOVELLUS  P/N 27-032653-00  S/N 3778  AMU2-1

NOVELLUS 02-127707-00 ASSY SYS CONT P166-64-24V

15-324541-00 /SPINDLE AL / NOVELLUS

02-034310-00 / ASSY,MOD CNTRL,P100/16M

NOVELLUS SYSTEMS YSC-02D04B02, 61-306478-00

NOVELLUS 16-162983-00, 300mm AP 510044 06 003 Heater Assembly

OEM Part NOVELLUS  30-259812-00 Coil EM D Coil HCM  PVD

ACE Novellus S33-2025 200mm Shower head Assembly

27-034223-00 /TRAZAR 10E-1MATCH 5KW 150MMSPD / NOVELLUS

NOVELLUS 02-261086-00 SPEED-S ESC

Novellus 300mm HDP ESC, 02-264836-00, 

Novellus 15-00003-02, Plate, Top(Process), C1

Novellus SIOC WTS0 SIOC FIELD CONNECTOR MODULE

Novellus SIOC WTS0 SIOC FIELD CONNECTOR CTOR MODULE

Novellus SIOC WTS1 SIOC FIELD CONNECTOR MODULE

Novellus 02-257935-00 Assy, MC3E Platform Controller with Ethernet, 417261

3004  ENI Plasmaloc 2-HF Low Frequency Generator Novellus P/N: 27-00073-00

Novellus 27-050014-02, CDP2407-2, Animatics Motion Controller Concept, 406060

AE Advanced Energy 3150274-009, Mercury 3013 Match, Novellus 27-265775-00

Novellus ASSY PLATEN,UPP1, ED, CURRENT 3.X CEDA, 02-281641-00

Novellus 02-00333-00, WAFER FLATFORM ASSY, Opto-Sensor for Metal Cassettes

SHIELD;17-157996-00

VALVE-ASSY;61-288740-00,Pneumatic PNL in

NOVELLUS 27-251604-00 TURBO PUMP TMP 2000L  LEYBOLD

OEM Part Novellus 02-267289-00 ASSY,TOP LEV,ESC,IMD HEX,ELAS,HDP300mm Speed

NOVELLUS SYSTEMS / SESIOC 0 PVD IXT / 02-272805-00 REV 1 (DHL/FedEex/EMS)

05-119299-01 / MONITOR, MAINT, LCD UPGRADE KIT/ NOVELLUS

02-00374-00 / PCA,TERMINAL PANEL C1 NG (ALL)/ NOVELLUS

Novellus R02-281532-00 RF Match Source Aluminum Coil Refurbished

AE MERCURY 3013 MATCH 3150274-004, 27-130951-00 , RF Matcher, NVLS SPD-S C2

NEW SAFC Hitech Enabling Technology/ASM/Novellus ALD Ampoule/Bubbler

Novellus HDP ESC 300MM, 02-264836-00 Rev B

Novellus HDP ESC 300MM, 02-260547-00 Rev C

Novellus Speed Controller 27-054088-00 Rev.A, A630-413-3000

OEM Part ESC,300MM,IXT Innova  NOVELLUS 15-270165-00 SEMCO N300P, J082238-2

COMDEL CLF-500 RF NOVELLUS  FP1140R1

TREK POWER SUPPLY;27-297727-00,ESC P/S 89X4  TREK 685-L-CE HIGH-VOLTAGE POWER

NOVELLUS 02-00119-00 Geneva Drive Assembly

ADTEC AXR-2000III RF Plasma Generator Novellus 27-360919-00  Tested Working

Brooks Automation 154622 Robot Controller Series 8 Novellus  Working

Novellus150MM Geneva Drive Assembly PN 02-00119-00

7667 NOVELLUS CHAMBER COVER W/ PHOTOELECTRIC SWITCH(E3S-AT66-D) 15-257176-01

Rebuilt Novellus Gamma 2130 RF Match Source Matching Network PN: 02-281532-00

05-2854  / APPLICATOR,ONE-PIECE (SIX POST) / NOVELLUS

02-263840-00 /STAGE ASSY.SINGLE HEATER 200MM/ NOVELLUS

Novellus 03-10641-01 DCLM Load Lock Chamber Rev. L Concept II  Working

Novellus / Varian 3000 Series Master Controller 19-113956-00 ++

19-00128-00 /PCB, CPU W/JUMPERS, SLOT 2,** W/EXCHANGE **/NOVELLUS

02-253704-00 /ASSY,MC3E MODULE CNTR W/ETHERNET/ NOVELLUS

Novellus 02-281532-00 RF Match Source Aluminum Coil  Working

5102 NOVELLUS HEATER PEDESTAL BLOCK 02-264308-00A

Novellus 26-167697-00 I/O Interface PCB 03-167697-00 76-167697-00

Novellus Vector Pedestal Heater for 300mm

Novellus 02-279-01, C1, PCP Box, Control Panel

NOVELLUS 02-106217-00 REVC, ASSY, WTS-0 SIOC, CONTROLLER

NOVELLUS 02-143079-00 ASSY, SIOC 2 SIOC, Digital Dynamics 02-122156-00

NOVELLUS 02-144985-00, WTS 3 FOUP, SIOC CONTROLLER, 27-053659-00

Novellus 0010-03342 Rev. 001, Lower Electrode Heate ASSY

Novellus 21-602279-013 / Applied Percision 20-602279-000

02-357829-01, ASSY, END EFFECTOR, 11.0INCH, CMPLT, FRCTN,T-B, Novellus

15-100263-00 /ROBOT BLADE 200MM HI PURITY / NOVELLUS

ASSY, PCB, ANA.OUT W/JUMP, 19-00136-00

ASSY, PCB, Digital I/O #2, 19-00157-00, Concept one, C1, Novellus

NOVELLUS AS,SYS_CONT,QNX4,DUAL_ETHER,P/N 02-157591-00 CONTROLLER

NOVELLUS 17-260362-00 SHIELD BARREL GRIT BLAST PVD300, NEW

Varian / Novellus 5" DC Bias Heater ++

NOVELLUS 02-127708-01 ASSY CONT, P166 / 64/ 24V  QNX4 CONTROLLER

NOVELLUS 04-055160-00 KIT,FINAL ASSY,H/W INDEXER

Novellus 02-259457-00 C3 Vector Spindle Complete Assembly Rev. J  Working

Novellus 02-259457-00 C3 Vector Spindle Complete Assembly Rev. J Copper 

Novellus 02-324753-00 C3 Vector Spindle Assembly Rev. 2  Working

Novellus 02-304871-00 RF Match Assembly Aluminium SST-PEEK 1.12 Untested As-Is

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. K  Working

Novellus 03-10641-01 Right Indexer Rev. M Concept II  Working

Novellus 03-10641-00 Left Indexer Rev. L Concept II  Working

Novellus 03-10641-00 Loadlock Robot Rev.K Concept II Altus working

Novellus 03-10641-01 Loadlock Robot Rev.L Concept II Altus working

Novellus 02-252432-00 C3 Vector Spindle Assembly Rev. G  Working

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. G Copper Exposed 

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. E 

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. D Copper Exposed 

Novellus 02-252432 C3 Vector Spindle Assembly Rev. G  Working

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. F Copper Exposed 

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. G  Working

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. F  Working

Novellus 01-133875-00 SIOC Anneal Controller Digital Dynamics 02-134495-00 

Novellus RF Match 02-266279-00 Rev. C New

02-159684-00/ NOVELLUS  PEDESTAL 300MM WCVD,PREHEAT ASSY / NOVELLUS

Novellus 02-050024-00 Geneva Drive Assembly

Brooks PRI 002-5870-06 Robot Electronic Module Controller, Novellus, 421594

Novellus 38-276335-00 Cable, 406409

NOVELLUS 17-307113-00 SHIELD PEDESTAL AL GRIT CU PVD300 , NEW

AE ADVANCED ENERGY E'WAVE 3152603-015 GENERATOR NOVELLUS 27-282098-00 RF

7763 NOVELLUS VECTOR SPINDLE ASSEMBLY,24A4BEPM-3F 02-252432-00

Novellus 03-121097-00 Heater Chuck 16-156335-00 200mm Assy PVD Chamber 402651

Novellus 02-076-00, C1, Contorl Panel

TRAZAR TOP MATCH,  Novellus 02-260957-02

Comdel ESC-4 Electrostatic Voltage Source E-chuck FP6283R2 Novellus E-chuck HVPS

NOVELLUS 15-150002-00 RING, GUARD, LTM, HDP300 , NEW

Novellus NVLS 02-305072-00 Rev A  Drive Assembly

YASKAWA / NOVELLUS SYSTEMS YSC-BSA01038PLPS / 02-294831-00 NEW SURPLUS, NO BOX

YASKAWA / NOVELLUS SYSTEMS YSC-BSA01038PLP / 04-294397-00 NEW SURPLUS, in BOX

NOVELLUS  02-00105-00  KIT,CAPAC. WITH JUMPER

NOVELLUS 02-127707-01 ASSY SYS CONT, P166 / 24V  QNX4 CONTROLLER

Novellus 02-103970-00 Mod Controller, P166/64, 24V, 411203

962691, S3410071, AURIGA DISC ATI  10IN NOVELLUS

Novellus SHIELD, Reverse Tophat(Barrel), PC300, 15-267250-00

Novellus 02-132030-00 ASSY,MOD,CTR,P166/64/QNX4 controller

NOVELLUS G19-10013-00,TRUST AUTOMATION TA2017 4 AXIS CASSETTE CONTROLLER

2848 Novellus 02-292391-00A Heater Pedestal Block

60-00012-00 Novellus Cylinder, Pneumatic, Cassette Door. Brand new

Brooks MTR5 ROBOT 001-7600-07 (NOVELLUS / SEQUEL)

NOVELLUS 16-383780-00 SHOWER HEAD

Comet matching network 2kw 13.56mhz AE RFPP amat 27-352799-00 novellus

brand new VAT 65040 ISO100 throttle gate valve - amat novellus uhv vacuum mks

Novellus RF Source 13.56Mhz Match Matching Network 13.56 Mhz

OEM Part NOVELLUS 15-127251-00 AIN-PEC AND CONCEPT 3 SPEED INJECTOR SET (36 PIEC

27-00141-00 / CONTROLLER, ADAPTOR, AC 4S02/NOVELLUS

Novellus, 15-385384-00, RING, INSULATOR, CERAMIC, HCM TARGET, Oem New

NOVELLUS MODULE CONTROLLER P100,P/N 02-034310-00

NOVELLUS G19-10012-00,TRUST AUTOMATION TA2018 3 AXIS LOADER CONTROLLER

ADTEC AXR-2000III RF Plasma Generator Novellus 27-360919-00 Tested As-Is

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. J Copper No Covers 

ADTEC AXR-2000III RF Plasma Generator Novellus 27-360919-00 RF Trip Tested As-Is

XCEDA FAC HDSIOC NOVELLUS 02-309772-00 VERSION 4.72

Bay Voltex, Heat Exchanger, Novellus, HRE-HT-0650-G-1

VAT 65040-PA52-BHK1/0093 Throttle Gate Valve, Novellus 63-287207-00, 409584

Novellus P100 Controller Module 02-034310-00 Rev. K Novellus Concept Two Altus

NOVELLUS PCB, EPROM RAM W/JUMPERS, 19-00122-00

Novellus 02-177027-00, ASSY, PLATEN, RF, MCA BALLS with RETAINING

NEW Kollmorgen 12-939600 Actuator, Novellus/ASM/KLA?

Novellus Wafer Processing Oven Air Control Module 02-18029-002  R12/040-9601

Novellus Wafer Processing Motion Interface Module - RCL Enterprises - Delta Tau

NEW Novellus/GaSonics 94-1172 Rotator, Receive Asyst PN: 04600-002 w/Arm Control

NOVELLUS SYSTEMS P/N61-326238-00 MODEL NO.YSC-BAS01038PL

Novellus P100 Module Econtroller, 02-034310-00 Rev. R W/O HARD DRIVE

27-052211-00 /RF MATCH / NOVELLUS

BOC Edwards TIM number U20000617 Novellus Process

Novellus 02-00093-00R One Arm Robot, 408129

SHIELD;15-273669-00,Chamber Upper PC300 (RPC)

19-00156-00 /PCB SLOT 4, DIGITAL I/O 519A #1 **W/EXCHANGE** /NOVELLUS

NOVELLUS 02-301783-00 HEATER PEDESTAL Untested as-is

VAT 9698973S004, Turbo Pump, Novellus 27-251377-00, 410786

Novellus Systems H2 Pneumatic Interlock Vector PCB 03-164301 26-164301 76-164301

652D-BB / MKS THROTTLE VALVE CONTROLLER NOVELLUS/ MKS

Novellus 73-0068 GSNX New Elevator Alignment Tool Left Side Pin GaSonics 

Asyst 03330-001 Theta Arm Transport Unit Hine Novellus 94-1085 Aura 2000LL 

Novellus 73-0068 GSNX New Elevator Alignment Tool Right Side Pin GaSonics 

Novellus Shield Ring Ceramic 300mm, p/n 15-306819-00 Brand New

15-118122-00, Novellus, LAM, INSULATOR TARGET, NEW, SEALED

15-118123-00, Novellus, LAM, RING INSULATOR ANODE, NEW, SEALED

Novellus Gen 3 Pedestal Shield PVD300, 17-291211-00 Wafer Processing

19-00161-00 /MOTOR-EXT W/DRIVER/ NOVELLUS

Controller ECC / ESC Controller TRAZAR ECC1-4F NOVELLUS 27-153218-00

OEM Part NOVELLUS  02-034310-00 ASSY,MOD CNTRL,P100/16M (NEW)

Novellus 15-113290-00, 16-033537-00, Lift Assembly, Compact Cylinder, 422240

Emerson 6592 Motor & Gear Box, Inverter, Ipec Speedfam Novellus, .50 HP, 420707

Novellus Chamber Shield 15-291107-00

Novellus 02-159684-00 A 118691 3409-002 Pedestal PNL HV FEEDTHRU SMALL PKT C3ALT

NOVELLUS COMPACT (LOT OF 2)

NOVELLUS 02-034310-00 ASSY,MOD CNTRL,P100/16M C2 Altus

Novellus Shield Ring Ceramic 300mm Cu , p/n 15-307111-00 Brand New

27-00082-00 /DRIVER,MOTOR,CX/ NOVELLUS

NOVELLUS 00-680909-00 PRESSURE PLATE RAM ASSY NOVELLUS

Digital Dynamics 27-810157-00 I/O Controller V3.02 Novellus Concept II 

Novellus FLVG CYL Replace Upgrade Kit 093033-797-21  Working

Novellus Over Ash Pedestal Assembly 02-318371-00 Rev. B  Working

Digital Dynamics 27-810157-00 I/O Controller V4.1 Novellus Concept II Altus 

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. F No Motors  Working

Novellus 02-130617-00N C3 Vector Spindle Assembly Rev. D No Motors  Working

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. G Copper Exposed No Motors

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. F Copper Exposed No Motors

Novellus 02-130617-00N C3 Vector Spindle Assembly Rev. B No Motors  Working

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. D No Motors  Working

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. K No Motors  Working

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. J No Motors  Working

Edwards 2XQ80-QMB1200 Power Distribution Box Novellus Concept II  Working

4908 NOVELLUS ROBOTIC ARM RAZOR 42CM LONG 02-270536-03 REV B

15-110411-00 /WINDOW, SAPPHIRE, PURE, THIN 17882 /NOVELLUS

VAT Slit Valve 03012-LA24-0001/0515 A-634396 for Novellus

Novellus 02-034310-00 P100/16M Controller Module

Novellus 030-900105, Spindle Bottom Plate, 6-32841-002, 405987

NOVELLUS 15-271135-00 ROBOT BLADE END EFFECTOR 406744

LAM NOVELLUS TYPE 292 29280B222 CDM FIXED RF MATCH NETWORK LIST PCB 406071

7800 NOVELLUS ROBOTIC ARM RAZOR 42CM LONG 02-273860-03

NOVELLUS SYSTEMS P/N61-326238-00 MODEL NO.YSC-BAS01038PL NEW IN BOX

MKS ASTRONex AX7685 Remote Plasma Source - Novellus 27-425457-00

Novellus 02-131736-00 Rev.A, ISIOC HI-LO Transfer Assembly. 417234

Novellus 02-273739-00 Rev.1, HDSIOC 1 PDL OXIDE Firmware 4.72. 417235

Novellus 02-116239-01, 0104-NV-3115-1

60-00012-00 Novellus Cylinder, Pneumatic, Cassette Door, refurbished, w/warranty

NOVELLUS 60-056290-00 VALVE,PNEU,GATE,50MM X 336MM, Pmin= 4bar=0,4MPa, Pmax= 7ba

NOVELLUS TEOS MINI BULK CABINET Chemical Delivery-Support System

NOVELLUS HDSIOC E84 FE AWC AUTOCAL

Novellus 04-732323-00 O/P Power Cable Assembly, 408510

NOVELLUS QUAD OUTPUT POWER SUPPLY 725-NS/N

Novellus Barrel Shield 17-260360-00 Rev C, 300MM

Novellus 02-377211-00 4400V RF Box

NEW Novellus PN: 60-186996-00 C3 Altus Manifold Panel Assembly Pneucon

Novellus Controller 02-105157-00 Rev A / ASSY  P166 / CNTRLR, 64 MEG

Novellus 05-294579-00, Preheat 2130 Welded Type II FCO Pedestal, SEALED

Novellus 16-285326-00-01 Rev. A, Preheat 2130 Welded Type II FCO Pedestal

Novellus Concept One Slot 11 Indexer Board 19-00124-00 ++

Advanced Energy MN3150272-006 C SE Mercury 1013 RF Match Novellus 1912078700

Novellus Shield 17-291209-00 1000153207004

Novellus 02-113640-00 Assy SYS CONT P166/64 System Control Working!

Novellus 16-126665-01, PVD Universal Shield, 15LB, ESC Table, Grit, APVD, 406244

Novellus 41-0010-011 Electro-Craft Max-430 Brush Servo Drive, PCB, 411689

Valve VAT 02112-BA24-APN1/0809A-624982 NOVELLUS  60-135033-00 MONOVAT VALVE (NEW

15-110411-00 Window, Sapphire, for Novellus Concept 1 and Concept 2 Sequel Altus

15-032014-01 /QTZ WINDOW,ETCH RESISTANT,F SI / NOVELLUS

Generator NOVELLUS  813206 GENERATOR, ULTRASONIC, 40-S2X-24T-208V-A-CE RATING: 2

NOVELLUS 02-254402-00, ASSY,PLC,HE TEMP CNTRL

NOVELLUS PEDESTAL LIFT 2-3 02-047200

NOVELLUS 17447-01 ASSY, A3000, LAMP CONTROLLER

NOVELLUS 03-132813-00 INTERFACE TOOL CABLE H-BE 24 SS H-BE 24 BS 406751

NOVELLUS 03-132813-00 INTERFACE TOOL CABLE H-BE 24 SS H-BE 24 BS 406752

Novellus Digital Dynamics 02-252397-00 Vector HDSOIC 2

Novellus 853-163840-001 EIOC 1 VXL/VXT ASM, FE-EIOC 1 CFD OXIDE CONTA

Novellus 15-055299-00, 15-054203-00, Cassette Nest Assembly. 417189

Parker Porter P2000IDC007 Liquid Flow Controller, LFC, TMB, PI, Novellus, 411453

NOVELLUS ISIOC HI-LO Transfer 02-150755-00 REV.A

19-00126-00 /PCB, ANALOG INPUT (SLOT 6)  **W/EXCHANGE** /NOVELLUS

RadiSys SYS-ZDT-100 System Control Computer Novellus 02-828034-00  Working

Novellus 02-259457-00 C3 Vector Spindle Assembly Rev. K Not Working As-Is

Sioc Post Plate 2000 Novellus 01-130508-00 02-8130510-00 27-053659-00 27-053660

OEM-50N-11601 / RF GENERATOR ENI-50 FOR NOVELLUS (425 LBS)/ ENI

NOVELLUS 96-0362-MOT CONTROLLER BOX CB1-CB4

27-00117-01 /  CNTRLR,TEMP / NOVELLUS

Swagelok 6LVV-A61VD2DP-ASAS15860NV ALD 120°C Valve, Novellus 22-323742-00

NOVELLUS Part # 19-140844-00 TEACHPENDANT INOVA Rev. A

Novellus 20" HCM Adapter Shield, 16-165281-00

Novellus WTSO SIOC Field Connector Module 02-264833-00 firmware 4.72 Rev. A

15-032014-00 Window, Quartz, Etch Resistant, Novellus Concept 1 and Concept 2

CABLE-HIV, ESC CABLE, 03-250458-01, Novellus

Novellus 12” Shield Adapter with Arc Spray 16-260355-00

BIMBA PNEU TURN ROTARY ACTUATOR CPT-00568-A,NOVELLUS 60-10125-00B

Novellus A95-062-01

CHAMBER, GAS DIST. MANIFOLD, NVLS, NOVELLUS, 16-00013-01

Ipec Speedfam Novellus Berkeley ASM121-A-0/B-22-NB/10 Servo Motor, 421592

Ipec Speedfam Novellus Berkeley ASM121-B-0/B-16-NB/10 Servo Motor, 421593

KORO KORO ROBOT KR-A5100 (NOVELLUS / L3500PLUS)

Novellus 02-00090-00, Heater Filter, Board, FAB 27-00074-00, PCB Assy. 417319

Novellus 02-00090-00 Heater Filter Board, PCB, FAB 27-00074-00, 411573

RF SERVICES RFS3000MN, 27-00040-00, CONTROLLER, NOVELLUS, RF Matching Network

Novellus A95-107-01 Rear Panel Display Assembly, Loadlock, 422321

Novellus Berkeley ASM121-A-0/A-22-NB/10 AC Brushless Servo Motor, 422725

Novellus 16-140656-00 200mm AP5100 33 03 002 Heater Assembly

Novellus 16-156335-00 200mm Heater Assembly

Novellus R27-118980-00 Match AE DCVD Advanced Energy Industries 300V 57A

NOVELLUS SYSTEMS, 22-116895-00, PARKER, 45300401, VALVE-3 WAY, 3WAY,N/C,N/C

NOVELLUS SYSTEMS, 17-260362-00, SHIELD, AL6061,528*97

95-3628 /RS232 INTERFACE (DIGI BD)/ NOVELLUS

16-327424-01,RING, LIFT PIN, SPLIT, LEFT, PVD 300MM, Novellus, PIN-HOLDER

NOVELLUS SYSTEMS, 16-327424-02, PIN-HOLDER,RING, LIFT PIN,SPLIT,RIGHT, PVD300MM

Novellus 02-834310-00 Module Controller P100/16M Concept II Altus  Working

Novellus 02-169194-00 Robot Linear Track UDK5214NW RM26A3S  Working

04-269057-00, TOOL KIT, C3ALT, WHEEL BLOCK REMOVAL,NOVELLUS

Novellus Digital Dynamics 02-258471-00 SIOC Controller  Working

7422 BIMBA PNEU-TURN ROTARY ACTUATOR, NOVELLUS 60-10125-00B CPT-00568-A

TRAZA NOVELLUS ESC POWER SUPPLY ECC1-1

NOVELLUS, 02-10068-00, MODULE CABLE

National Electronics Magnetron NL10250-17, 1.9kw, Water Cooled, Novellus

Novellus 03-137065-00, Board, Pneumatic Interlock, Vector

ASSY, PEDESTAL LIFT 4 & 5, 02-047200-03, NOVELLUS

Novellus Heater Pedestal 02-033394-00 Type D, 200mm, 9" Diameter

Novellus 95-3628, Eop Controller, Power Supply

Novellus SIOC Controller, 27-053659-00

VAT 14048-PE24-AAE2 Stainless steel gate valve / Novellus SPD, Working Condition

Novellus Heater Pedestal 02-033394-00 Type D, 200mm, 9" Diameter

Novellus 61-402083-00 ASM, FE-HDSOIC 0 PRE CLEAN MAX

Novellus 17-260359-00 Process, Pedestal Shield 1000152211048 Semicondutor

Novellus P/N 17-307113-00 Process, Pedestal Shield 1000150210013 Semiconductor

Novellus Systems Gas Box Distribution Speed 300 PCB 27-111301-00 02-111301-00

Novellus 14" Flatted Heater Pedestal, 02-292391-00 A, 102513-0307-103

NEW Brooks GF125CXXC/GFC125C-923421 Mass Flow Controller, Novellus 22-427469-00

NEW Brooks GF125CXXC/GFC125C-893970 Mass Flow Controller, Novellus 22-384424-00

NEW Brooks GF125CXXC/GFC125C-894128 Mass Flow Controller, Novellus 22-386615-00

NEW Brooks GF125CXXC/GFC125C-896851 Mass Flow Controller, Novellus 22-388508-00

Novellus Mitsubishi Operator Control Panel MTA-100 ++

NOVELLUS SESIOC IXT PVD SIOC 1, Rev. 1, Firmware Ver: 4.6, 02-258471-00

LAM RESEARCH NOVELLUS TEACH PENDANT P/N 27-326390-00 Rev.A

Digital Dynamics 27-10157-00 I/O Input Output Controller IOC VER.4.1 Novellus

Novellus Cooling Station, 17387-02, L3500/1, 81-054172-00, Rev A New

Digital Dynamics I/O Controller IOC V4.1 Novellus

Novellus, Gasonics, PC Board - L.L.P.C, LIFTER, p/n 94-2807

QUARTZ INFRARED HALOGEN LAMP 61-276646-00, Novellus

Asyst Novellus 94-1086 Theta Arm Assy w/ End-Effector & 06764-002 Arm Cntl PCB

Novellus 02-033493-00, SP1493, Heater Chunk, Temp. 412071

Ipec Speedfam Novellus 4101-112459 Industrial Computer

Lambda 45A-28, Power Supply, 28V, 17.5A, LFS4528 Novellus QT330134

3844 ADEK INDUSTRIAL INDUSTRIAL PC NOVELLUS PN:04-165498-00 MKS PN:133 P6JD8380I

Novellus 16-129269-00 Bellows, To 8" CF - Flange, PC300, 409518

Novellus Concept-1 RF Filter Box, 03-00289-00 RF Cable, 418435

Novellus 02-120820-00 Assembly, DEGAS, Integrated, LDS, 420980

Novellus 02-120820-00 Assembly, DEGAS, Integrated, LDS, 420981

Novellus 02-033493-00, SP1493, Heater Chunk, Temp. 412056

Novellus Shield 17-291213-00 1000151707001

NOVELLUS SYSTEMS/SWAGELOK,  22-323741-00/6LW-ALD6HFR4-P-CS-NV, VALVE,DIAPH,2PORT

27-00029-00 / QUAD OUTPUT POWER SUPPLY(725-N) / NOVELLUS

NOVELLUS SYSTEMS, 15-281946-00, ASSY-HOLDER ,15-281946-00,NEW HOLDER ASSA

Novellus 02-810433-00 DLCM Power Distribution Module Concept 2 Altus Working

Novellus 01-133875-00 SIOC Anneal Controller Digital Dynamics 02-134495-00 As-Is

7555 NOVELLUS ESC WT NOTCH CLAMP 04-732063-01

Digital Dynamics I/O Motor Controller IOC EPROM V.4.1 NOVELLUS SYSTEMS

2808-106043,0102-106044, GBL-UHEAT,ASSY, PRINTER CIRCUIT UNIVERSAL HX NOVELLUS

Novellus, Exclusion Ring, 200mm x 2.0mm OH, SEMI MOER, no Flat, 02-032907-00

NEW Novellus G19-10078-00 Rev A with 25 Humphrey HA010E1 Air Valves

Novellus 150mm Bottom Fork Retainer Plate 15-00701-00 ++ NICE ++

Novellus Concept One Slot 3 EPROM Ram Board 19-00122-00 ++ CDC

Novellus Concept One Slot 3 EPROM Ram Board 19-00122-00 ++ GDC

NIPPON NOVELLUS SYSTEMS INTERLOCK BOX

Emerson 6592-A Motor & Gear Box, Inverter, Ipec Speedfam Novellus, 421553

Novellus 60-123331-00 / VAT 07512-UA24-0002/2777; A-757039

Power Supply  TREK 12315L NOVELLUS  19-137359-00 Power Supply 6 phase ESC Power

Novellus 02-359080-00 Robot Linear Track  Working

Novellus Shower Head, 16-365359-00, 300MM, 13 Inch, CTR

OEM Part Novellus 15-183815-00 Ring Ceramic

OEM Part NOVELLUS  A95-122-01 Gasonics  Load Lock Door External Assy.

NOVELLUS SYSTEMS, 15-118122-00, SHIELD, Ring Insulator, TARGET, PVD300

Novellus 02-149841-02 C3 Vector 300mm Assembly 15-156474-02  Working

Novellus 02-149841-01N C3 Vector 300mm Assembly 15-156474-01  Working

Novellus Digital Dynamics SIOC 2 02-267699-00  Interlock/Controller/Power Supply

Novellus Digital Dynamics SIOC C4D 0 02-267697-00  Interlock/Controller/Power S.

Novellus CVD-W Interlock Board 03-810748-00 27-10332-00 76-10656-00

NOVELLUS 02-834310-00 P100 653781-205/647633-205 Module Controller

Novellus 02-828522-00 System Controller P100/16M

6 Novellus 15-271403-00, Insulator, RF Break, KF16-KF16, C2SEQX, 417004

Novellus 02-259457-00  Vector Spindle  Assembly

04-714049-02 /SHIELD,DARK SPACE,04-714049-02,3290/ NOVELLUS

5922 NOVELLUS LTM VECTOR ASSEMBLY 15-156474-02 02-149841-02

5071 NOVELLUS 12" INCH CONCEPT 3 REPAIR 15-265814-00

VAT Valve 14040-PE24-0006/0579 A-633084 for Novellus

19-00268-01 ,MOTOR,Lift , NOVELLUS PARTS, Parker hannifin, ES23B-NR10

RF HF CABLE / ION SRC HF / NOVELLUS SPD-S, 03-255004-00

8070 NOVELLUS CHAMBER COVER 15-164135-01

Novellus 02-134264 ESC 200mm

Novellus ARC Lamp Cover with Optic Filter, 0111112 000 AB, 0084489 000 AD

NOVELLUS 02-259216-00 REV B PLATING CONTROL BOX

Digital Dynamics Inc. Coil Mon lxt HDSIOC NOVELLUS 02-292162-00 Controller

NOVELLUS SYSTEMS FE/LL INTERFACE VECTOR 27-137064-00 03-137064-00 76-137064-00

Novellus Digital Dynamics SIOC Sesioc 02-264834-00 REV.A free ship

15-00703-00 / FORK, TOP PLATE/ NOVELLUS

Advanced Energy Novellus 27-128942-00 500W Generator Power Supply 3155121-001