EL9186控制单元模块

EL9186控制单元模块

a）为透镜的截面结构，（b）为无电压状态，（c）为有电压状态。镜头装置通过弹性聚合物薄膜将高介电常数液体封装在薄玻璃片上的腔体中。同时，分别在薄膜下表面和薄玻璃片上表面沉积环形金属电极构成平行板静电致动器。当施加电压时，平行板电极由于静电吸引相互靠近，腔内液体被挤向透镜中心，改变了薄膜的曲率。该透镜结构紧凑（小于6mm×6mm×0.7mm）、驱动电压低（小于25V），可以利用MEMS制造工艺批量化生产。

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