A20B-9000-0500

A20B-9000-0500

A20B-9000-0500系统要求用两个按钮来控制A、B、C三组喷头工作（通过控制三组喷头的电动机来实现），三组喷头排列如图4-32所示。系统控制要求具体如下：

当按下起动按钮后，A组喷头先喷5s后停止，然后B、C组喷头同时喷，5s后，B组喷头停止、C组喷头继续喷5s再停止，而后A、B组喷头喷7s，C组喷头在这7s的前2s内停止，后5s内喷水，接着A、B、C三组喷头同时停止3s，以后重复前述过程。按下停止按钮后，三组喷头同时停止喷水。

A20B-9000-0500 

CTI-Cryogenics High Capacity Compressor 0190-07137 new

TEL ACT 12 Wafer Edge Exposure (WEE) Process Station

Tokyo Electron ACT 8 Wafer Edge Exposure(WEE) Prcss Stn

ABM-407B-1-S-CE?-S293 Robot Track 300DFF1P PRE-300BU

ESC-218BT-S293 

Rudolph Technologies MetaPulse 200 Metrology Tool 200mm

Rudolph Technologies MetaPulse 200X Cu Metrology Tool

Rudolph Technologies Metrology Tool MetaPulse 200X Cu

Tokyo Electron ACT 12 Develop Process Station Right

Tokyo Electron ACT 12 Develop Process Station Left

Tokyo Electron ACT 8 Develop Process Station Left 

Tokyo Electron ACT 8 Develop Process Station Right 

Edwards STP-A1603P Vacuum Turbopump AMAT 3620-00470 new

Novellus Concept Two Altus Wafer Chamber CVD-W complete

Shimadzu Turbopump TMP-3403LMTC rebuilt 3620-00486

Therma-Wave Opti-Probe 2600B thermawave optiprobe

Varian E1000 Implanter End Station 200mm Wheel

AMAT XR80 Implanter 300mm Wheel and motor 0020-99685

Tokyo Electron TEL ACT 12 Chemical Cabinet Working

TEL ACT 8 SOG Coat Process Station Right Working

TEL ACT 8 SOG Coat Process Station Left Working

Tokyo Electron TEL ACT 8 Chemical Cabinet Working

Tokyo Electron ACT 12 Coat Process Station Left

Tokyo Electron ACT 12 Cassette Block Robotics Arm 

Tokyo Electron ACT 12 Coat Process Station Right

Tokyo Electron ACT 8 Coat Process Station Left 

Tokyo Electron ACT 8 Coat Process Station Right

Tokyo Electron ACT 8 Cassette Block Robotics Arm

Genus 7000 CVD Mainbody 200mm Brooks Robot VCE

Edwards Vacuum Turbopump STP-XH2603P new 3620-00368

Novellus Concept II Two C2-DCLM-S Untested (For Parts) 

Novellus Concept II Two C2-DCLM-S Untested (For Parts) 

SMC Thermo-Con ACT 12 Tokyo Electron INR-244-244U-67?0

Pfeiffer Vacuum Turbopump TMH 1001P rebuilt

Varian E1000 Implanter Gas Box Assy. E11029020

Kensington 200mm Wafer Sorter Mapping Station CSMT-4

Brooks MagnaTran 8 Dual Arm Robot 0190-28689 untested

Takatori ATRM-2100 Delaminator Tape Remover Working

KLA-Tencor Prometrix FT-750 Film Thickness Measurement

Therma-Wave OptiProbe 2600B Film Measurement Module

ATS M-PAK Tmp Control System Chiller MP40C-DI new

AMAT Part No: 0190-08467