SC520

SC520

SC520

SC520

接地螺丝因机柜本体与底座间有胶皮形成绝缘，屏蔽地汇流排与底座间绝缘，

现场控制站按规定做好接地处理。即分别接至现场控制站接地汇流排上。

I/O柜的电源地与UPS的电源地接至同一个地，保证等电位。

2.各个硬件设备操作员站、工程师站、网络交换机、服务器主机、系统显示器等采用外壳接地或直接将电源地线连接至电气接地网。

3.I/O组件模拟量模件的40端即直流24伏的负端接至逻辑地汇流排上，逻辑地汇流排接至屏蔽地，再接入总接地汇流排。

4.屏蔽地现场控制站的保护地应从机柜下方的接地螺钉接至接地分干线,现场控制站的屏蔽地应从接地汇流排接至公共连接板。

5.接地电阻测试接地系统的电阻进行测试，以保证接地能满足控制系统制造商的要求。

1用电仪表的外壳、仪表盘、柜、箱、盒和电缆槽 、保护管、支架、底座等正常不带电的金属部分，由于绝缘破坏而有可能带危险电压者，均应做保护接地。

对于供电电压不高于36V的就地仪表、开关等，当设计文件无特殊要求时，可不做保护接地。

9931147  1

EMC过滤器 MURR10471，Max.250VAC/300VDC,6A 数量：6

HA-655-1-200      1

MDX61B0008-5A3-4-0T      1------------------

CE03250    1

PF6000/HTPU075-AC3-03   1         

HPN-81237     2

配件9210=A=0500polymetron    1建 

单元9210=C=0340HACH    2件  

配件z0E-1895000HACH   3个

GYB401D5-HC2-B                        

GYB201D5-HC2-B                             

GYB401D5-HC2-B   数量各2

CX5020-0111   1

VFAS3-2150P( 3 phase ,200VAC)       1

D5C-1DS0 欧姆龙传感器

E32-T61-D+E32-T61-L 欧姆龙对射传感器 各1

PXIe-8840   1----------------------

GYC202D5-RC2    1

PC00225 G CM041200 300A   1

TS63B2   1

3667528   1 WITTENSTEIN

001.12.180.008/3667529/1001279   2 WITTENSTEIN

HF-S11K1M4F-S6   1

2MB175N-120H数量2

2MBI300P-140-03数量8

MDI1FRD34C7-EQ-N

MDI1PRD23B7-EQ

欧姆龙 D4A-4501N  1件

NPFR-C1-SDF326   1

ADAM-4572    1

XSDRIN-03    1

TofinoXe-0200T1T1SDDZ90003TAT    1

AJ65SBTB1-32T1    1

MM-40MR-12MT-700A-ES-E   1

欧姆龙G2R-1 DC24V 10路   1

HK-FKGD40-PA   1

NDR120-24   1

LTD-1101J   4

MD480T160G/200P-JH   1

EDR-120-24  1

PCD230A  1

3BHE022291R0101 PC D230 A101

PCD231B    1

3BHE025541R0101 PC D231 B101

PEC光纤通讯板/3BHE013570R0001 SG0644H008   1

"PEC光纤通讯板/3BHE012049R0001 UFD128A01 SG22862146"   1

"PEC PLC电源模块/3BHE013431R0001 KUD181A01 Sub STATUS:1"   1

ACS800变频器/ACS800-01-0016-3+E200+L508+N671+P901   1

ACS800变频器/ACS800-01-0005-3+E200+L508+N671+P901   2

ACS800变频器/ACS800-01-0003-3+E200+L508+N671+P901   1

ACS800整流单元/ACS800-704-0910-7+F250+v992 带接触器   1

ACS800整流单元、ACS800-704-0910-7+F250 带接触器   1

ACS800整流控制板/DSSB-01C   1

ACS800逆变器/ACS800-104-0145-3   1

ACS550逆变器/ACS550-01-125A-4   1

喷射粱电源板/MK3ISVContactBoard(左板) 3

喷射粱电源板/MK3ISVContactBoard(右板) 3

NOVELLUS 02-120403-00 ASSY, TC, 300MM, SPRING LOADED

NOVELLUS 02-120736-00 ASSY,MECH ALIGNER,200MM,SABRE

NOVELLUS 02-138359-00 ASSY, LIFTING, SEQUEL FORK

NOVELLUS 02-138885-00 ASSY, REC BASE LIFTING JIG

NOVELLUS 02-147639-00 CU,ASSY, PNP PEROX OVERFLOW-P3

NOVELLUS 02-1485 COVER,PC BOARD,LAMP FAILURE

NOVELLUS 02-258799-00 HEATER BLOCK

NOVELLUS 02-270229-00 Local Power Box

NOVELLUS 02-270441-00 GAS BOX

NOVELLUS 02-2880 PANEL,ACCESS DOOR

NOVELLUS 02-3037 DIAPHRAGM PRESSURE RELIEF PROCESS CHAMBER

NOVELLUS 02-800470-01 PIN,LEFT,MECHANISM

NOVELLUS 02-800470-04 PIN,LEFT,MECHANISM

NOVELLUS 02-800470-05 PIN,LEFT,MECHANISM

NOVELLUS 02-800470-06 PIN,LEFT,MECHANISM

NOVELLUS 02-8122840-00 ASSY, 2 PC WFR LIFT PIN, WCVD

NOVELLUS 02-83114-00 CABLE, PROBE

NOVELLUS 02-834310-00 MOD CONT, P100/16M

NOVELLUS 02010-BA24-1008 GATE VALVE RECTANGULAR (VAT)

NOVELLUS 0225-700496 RELAY, INTERLOCK

NOVELLUS 0250-700638 SWITCH, TELEPHONE LIGHTPEN

NOVELLUS 0275-700600 SENSOR, DISPLACMENT

NOVELLUS 03-00019-02 PCB BOARD

NOVELLUS 03-00029-02 CABLE CASS NET FOR NOVELLUS CONCEPT 1

NOVELLUS 03-00046-03 CABLE, HIGH FREQ, RF

NOVELLUS 03-00172-00 JUMPER,CONNECTOR

NOVELLUS 03-00197-00 CABLE-PIN LIFT

NOVELLUS 03-00211-00 DISPLAY CABLE

NOVELLUS 03-00215-00 SHOWERHEAD

NOVELLUS 03-00258-00 HEAD, SHOWER 200MM STYLE B

NOVELLUS 03-00295-00 CABLE ASSY ROT SENSOR

NOVELLUS 03-027501-00 PCB PCA BROOKS INTERFACE

NOVELLUS 03-028165-00 CABLE ASSY

NOVELLUS 03-032706-00 PCB,DLCM,LWR,INTLCK

NOVELLUS 03-042300-00 TC CABLE

NOVELLUS 03-045000-00 CABLE ASSY

NOVELLUS 03-045293-00 CONTROL PANEL ASSY

NOVELLUS 03-046938-00 Cable

NOVELLUS 03-055057-00 TOUCHSCREEN INTER. CABLE

NOVELLUS 03-10220-01 CABLE ASSY, OEM25, RF, PS, DSCR

NOVELLUS 03-10586-00 HARNESS, LEFT INDEXER SENS

NOVELLUS 03-10691-00 SWITCH, WATER, FLOW

NOVELLUS 03-10691-00 SWITCH, WATER, FLOW

NOVELLUS 03-10738-00 GAS BOX INTERCONNECT PCB

NOVELLUS 03-10766-00 ASSY FILTER BOX

NOVELLUS 03-10777-00 CABLE ASSY, END POINT

NOVELLUS 03-10848-00 ASSY, HARN, GAS LN INTLK

NOVELLUS 03-259507-01 CABLE ASSY 9 PIN DSUB

NOVELLUS 03-271686-00 CABLE ASSY CONTROL

NOVELLUS 03-323688D01 PCB ASSY VAC CNTRL BRD

NOVELLUS 03-80271-00 PEDESTAL 4"

NOVELLUS 03-80312-01 CONTROL PANEL

NOVELLUS 03-834720-00 RIGHT LOADLOCK INTFC PCB,DLCM-S

NOVELLUS 04-0050 TUBE,PLASMA CERAMIC(8.660LG)

NOVELLUS 04-129526-00 RING SPLIT GUARD

NOVELLUS 04-275957-00 MC3 24 V POWER SUPPLY

NOVELLUS 04-705447-01 PCB SENSORVARIAN 2000 FAC 7147

NOVELLUS 04-705666-01 BELT STEEL VARIAN 2000

NOVELLUS 04-708026-02 ARM XFER UPPER SS M2I W/O BASKET

NOVELLUS 04-708027-02 HOLDER 8 INCH WAFER

NOVELLUS 04-708202-01 WASHER ARM PICK 200MM 6 INCH

NOVELLUS 04-708235-01 ENCODER OPTICAL

NOVELLUS 04-708629-02 PCB DUAL BEAM OPTICAL SENSOR

NOVELLUS 04-708650-01 PCB OPB706A SENSOR 6 INCH VARIAN M2000 FAC 7147

NOVELLUS 04-709083-01 BRACKET VARIAN 2000 FAC 7147

NOVELLUS 04-709852-01 SHIELD LOWER COLLIMATOR

NOVELLUS 04-710176-01 TIMING BELT, 250GR

NOVELLUS 04-710177-01 EXTENDER,SHAFT

NOVELLUS 04-710582-01 SPACER SPRING

NOVELLUS 04-711936-01 TUBE ASSY

NOVELLUS 04-712157-02 SPRING,P/P,RAM,SHLD

NOVELLUS 04-712165-01 SHIELD,6,FRNT PLT,BORE

NOVELLUS 04-712167-01 SPRING,RET,SHLD,HTR

NOVELLUS 04-712188-01 SHIELD ASSY,PRESS PLT RAM

NOVELLUS 04-714054-01 SHIELD,DARK SIDE

NOVELLUS 04-716099-01 ISO VLV 1X10 VAT

NOVELLUS 04-716197-01 COLLIMATOR 1 X 1 5/8 INCH

NOVELLUS 04-716386-01 ASSEMBLY POU FILTER/GASKET

NOVELLUS 04-716610-01 SHIELD UPPER COLLIMATOR

NOVELLUS 04-716630-04 DEPOSITION SHIELD

NOVELLUS 04-716733-01 SPRING L/L RAM SHIELD

NOVELLUS 04-716948-04 SHIELD HEATER 8INCH CLAMPLESS

NOVELLUS 04-717507-01 WEIGHTED CLAMP (CLEANED)

NOVELLUS 04-717508-02 PIN PRECISION AL203 CERAMIC

NOVELLUS 04-717921-03 RING

NOVELLUS 04-718616-02 AY FLEX TUBING

NOVELLUS 04-719408-03 SWITCH BRASS PROTEUS FLOW .25GPM

NOVELLUS 04-719408-04 SWITCH FLOW PROTEUS 2.56 GPM

NOVELLUS 04-720173-01 CNTRLR,V250 W/O CBL

NOVELLUS 04-720587-01 SHIELD CERAMIC TABLE

NOVELLUS 04-720751-01 CARTRIDGE H20 FILTER

NOVELLUS 04-720954-01 KIT, SEAL

NOVELLUS 04-720954-11 GATE

NOVELLUS 04-722260-03 CONCENTRATOR

NOVELLUS 04-722417-01 RING

NOVELLUS 04-722842-01 KIT UPGRADE AIR CYL

NOVELLUS 04-730718-01-3 SHIELD

NOVELLUS 04-731601-02 SHIELD (CLEANED)

NOVELLUS 04-731602-02 SHIELD (CLEANED)

NOVELLUS 04-732004-01 TUBE,INSULATOR

NOVELLUS 04-732026-02 CABLE ASSY

NOVELLUS 04-733008-01 ARM, HOLDER

NOVELLUS 04-8120205-00 KIT,OEPD,DUAL,STD ALTUS

NOVELLUS 05-00007-00 PM,KIT,REACTOR CHAMBER

NOVELLUS 05-00009-00 KIT PM POU/SI FILLTER

NOVELLUS 05-00011-00 PM KIT GAS FEED-THRU

NOVELLUS 05-00023-00 PM KIT SEMI ANNUAL

NOVELLUS 05-00066-00 KIT PM REACT 200MM

NOVELLUS 05-00077-00 KIT PM ROBOT SEALS

NOVELLUS 05-00108-00 PM KIT, LOAD LOCK FILTERS C1-W

NOVELLUS 05-00110-00 PM KIT TEE SEALS C1W

NOVELLUS 05-05028-05 DC-DC CONVERTOR CYMER

NOVELLUS 05-10347-00 KIT PM N2FILTER1

NOVELLUS 05-10348-00 KIT, PM T-SEAL

NOVELLUS 05-124534-00 KIT O-RING SPEED CHAMBER

NOVELLUS 05-126872-00 KIT, CPEC, 200MM NOTCHED

NOVELLUS 05-14-067-00 V-BELT (POSITIONING)

NOVELLUS 05-3332 EXTENDER TOP COVER SAPPHIRE PL

NOVELLUS 05-50002-00 KIT, FILTER, 0.05 MICRON

NOVELLUS 05-50014-00 WATER FLOW S/W

NOVELLUS 05-50020-00 VACUUM BOX KIT

NOVELLUS 05-50033-00 KIT, CASSETTE HOOKS/SENSORS

NOVELLUS 05-50045-00 KIT ROTATION DRIVE

NOVELLUS 05-50069-00 KIT ROTATION DRIVE

NOVELLUS 06-0150 QTZ PIN

NOVELLUS 06-08140-00 CERAMIC RING

NOVELLUS 06-2605 KEY ISOLATION PLATE AL

NOVELLUS 06-2624 PLATE TOP UPPER

NOVELLUS 06-2625 PLATE BOTTOM

NOVELLUS 06-2640 SPOOL, QUARTZ

NOVELLUS 06-2654 ORIFICE,BOTTOM SAPPHIRE,ASTEX

NOVELLUS 06-2725 SHOWER HEAD,TUBE 1.83ID

NOVELLUS 06-2726 SHOWER HEAD,BOTTOM,SAPPH

NOVELLUS 062-00016-00 FLAG

NOVELLUS 07-20216-01 LEAD NUT ANTI-ROTATION

NOVELLUS 0700-700837 GASKET, PLATE COVER

NOVELLUS 0700-717454 DELRIN RING, .590 THK

NOVELLUS 0700-717577 SEAL, SLINGER SPIN ARM DELRIN

NOVELLUS 0700-727372 SEAL, SLINGER

NOVELLUS 0710-110107 SWITCH SELECTOR CONTROL UNIT(IDEC ABN1ZC1)

NOVELLUS 0710-120033 SWITCH SELECTOR CONTROL UNIT(IDEC TK1557 ASN33ZC6)

NOVELLUS 0710-717547 CLAMP, U BAND UP RING INTG PAD

NOVELLUS 0710-727158 CONNECTOR, SLURRY SHIELD RING

NOVELLUS 0710-738898 SHEET, ABRASIVE CND BLADDERLES

NOVELLUS 0720-111545 RING, CYLINDER WAFER BELL COUP

NOVELLUS 0720-700370 MOUNT, BULKHEAD PANEL

NOVELLUS 0720-717415 MOUNT, WAFER CARRIER

NOVELLUS 0720-718327 RING,STRIP BUMPER

NOVELLUS 0730-700047 BUSHING

NOVELLUS 0750-700181 CYLINDER,ROTATE

NOVELLUS 0750-700181 CYLINDER,ROTATE

NOVELLUS 0750-717491 CYLINDER,AIR,GAARD,ARM

NOVELLUS 0790-738891 BASE, PAD BLADDERLESS COND.

NOVELLUS 08-19891-026 SHIELD UV LARGE CLEAR

NOVELLUS 08-19891-027 WINDOW VIEWPORT QUARTZ T LARGE 5-7/8 X

NOVELLUS 08-21006-030 WINDOW VIEWPORT GLASS ASPR

NOVELLUS 08-21427-006 WINDOW QUARTZ EPD

NOVELLUS 08-22233-010 WINDOW VIEWPORT QUARTZ REAR (MCPAC 150)

NOVELLUS 08-22233-011 WINDOW UV SHIELD REAR MCPAC 150

NOVELLUS 08-22249-001 GATE VALVE

NOVELLUS 08-22434-001 WAFER MANIHOLDE ASSY

NOVELLUS 08-22434-051 COLLIMATOR OXIDE

NOVELLUS 08-22816-006 PLATE ADAPTER

NOVELLUS 08-24258-000 SUBSTRATE FAB FLAT BARE 150MM

NOVELLUS 08-24747-020 BELLOWS LIFTER R I E

NOVELLUS 08-30293-081 CLAMP CAP

NOVELLUS 08-34733-000 SUBSTRATE ASPR-CLL 125MM

NOVELLUS 10-00033-00 BACKFILL FILTER

NOVELLUS 10-00034-00 WELDMENT, GAS TUBE

NOVELLUS 10-00036-00 GAS LINE

NOVELLUS 10-00172-00 LINE TEFLON PIPE SIH4

NOVELLUS 10-00223-00 TUBE ASSY, .007 INJECTOR

NOVELLUS 10-00285-02 TUBE-LONG SHWR COOL

NOVELLUS 10-00346-02 TUBE ASSY

NOVELLUS 10-00360-00 DEGAS BY-PASS TUBE ASSY

NOVELLUS 10-00360-00 DEGAS BY-PASS TUBE ASSY

NOVELLUS 10-00376-00 ADAPTER, 1/8" VCR MALE TO LFC

NOVELLUS 10-00416-00 TUBE,BOTTOM

NOVELLUS 10-00417-00 TUBE,UPPER

NOVELLUS 10-00418-00 TUBE,LOWER

NOVELLUS 10-00419-00 TUBE,UPPER

NOVELLUS 10-00420-00 TUBE,LOWER

NOVELLUS 10-00421-00 TUBING, PURGE LINE, 1/16"

NOVELLUS 10-027392-00 Tube Divert for 8 channel box

NOVELLUS 10-029376-00 TUBE ASSY D MAN/CRYO BRK

NOVELLUS 10-042661-00 TUBE ASSY,MANIFOLD B&E

NOVELLUS 10-046842-00 C1W H MANI. LOWER

NOVELLUS 10-046843-00 C1W H MANI. UPPER

NOVELLUS 10-046844-00 C1W MOD MANI. UPPER

NOVELLUS 10-046845-00 C1W STO INLET MAN

NOVELLUS 10-046849-00 DD GASBOX STNO FILTER WELD

NOVELLUS 10-046851-00 DD GASBOX STN0 OUTLET WELD

NOVELLUS 10-046853-00 DD GASBOX STNO AR INLET WELD

NOVELLUS 10-046854-00 DD GASBOX STNO GAGE WELD

NOVELLUS 10-051632-00 TUBE ASSY,SHORT SPOOL,NUPRO

NOVELLUS 10-053060-00 TUBE ASSY PRESSURE CONTROL

NOVELLUS 1077642-71 RF GENERATOR CABLE

NOVELLUS 12-8872-054 ASSY,CBL,L&R WAFER SENSE

NOVELLUS 13-332016-00 NUT,WING,3/8-16

NOVELLUS 13-46870-01 CRESENT PIN CARRIAGE

NOVELLUS 13-8082-039 ROLLER, END CAP SUPPORT DUA

NOVELLUS 13-8092-337 SCREW ONTRAK LEAD W/NUT V3-2

NOVELLUS 13-8872-027 BLOCK,STOPPER,LOCATOR

NOVELLUS 1420-717038 RING,WEAR,PBT

NOVELLUS 1420-717052 RING, TOP CLAMP

NOVELLUS 15-00019-02 FLANGE, BLANKOFF, ALUM

NOVELLUS 15-00068-01 PADDLE ASSY, 150MM

NOVELLUS 15-00126-00 BRACKET

NOVELLUS 15-00311-00 NICKEL CAP NUT

NOVELLUS 15-00341-00 NICKEL HEX HEAD BOLT, 1/4-20 THREAD

NOVELLUS 15-00368-00 GENEVA DRIVE FLANGED SHAFT

NOVELLUS 15-00371-00 NICKEL 1/4-20 HEX NUT

NOVELLUS 15-00391-00 BUSHING, CERAMIC UPPER

NOVELLUS 15-00403-00 WTM UPPER ARM FIXTURE(TWO

NOVELLUS 15-00413-00 SPLINE ASSY THRUST WASHER

NOVELLUS 15-00416-00 SPACER, VACUUM (4IN)

NOVELLUS 15-00480-00 GENEVA DRIVER

NOVELLUS 15-00501-00 COUPLER OAR NUT V4-6

NOVELLUS 15-00511-00 SPACER ROTATION SHAFT

NOVELLUS 15-00539-00 SEAL,COVER

NOVELLUS 15-00554-31 SHIM, HEATER, 0.031" V-TYPE

NOVELLUS 15-00556-01 BRKT,DISCON

NOVELLUS 15-00578-00 SLEEVE, FLANGED, AC FEEDTHRU, CERAMIC