3HAB 7229-1

3HAB 7229-1

3HAB 7229-1

3HAB 7229-1

2、 数字量信号连接应注意的问题

变频器的输入信号中包括对运行/ 停止、正转/ 反转、点动等运行状态进行操作的数字量输入信号（开关型指令信号），这些信号常来自PLC 的数字量输出信号。PLC 通常利用其内部的继电器接点（继电器输出型P L C ）或具有开关特性的元器件（晶体管输出型PLC）与变频器相连，得到运行状态指令，如图1 和图2 所示。在进行数字量信号的连接时应注意：

（1）使用继电器输出型P L C 与变频器相连时，应注意接触不良常带来变频器误动作，因此在实际接线中要注意连接可靠。

（2）使用晶体管输出型P L C 与变频器相连时，应注意晶体管本身的电压的高低、电流的大小等限制条件在其范围内，保证系统的可靠性。

（3）设计变频器的输入信号电路时，应尽量避免采用继电器等感性负载，因继电器开闭产生的浪涌电流可能引起变频器的误动作。

（4）当P L C 输出的开关信号进入变频器时，有时会发生外部电源和变频器控制电源之间的串扰，应注意对P L C和变频器分开接地，避免两者使用共同的接地线。

MKS ASTeX ASTRONi Remote Plasma Source AX7670 Rev.D

MKS Astex AX2110 1000w Microwave Power Generator

MKS ASTeX ASTRONhf Remote Plasma Source AX7640-01 Rev.A Rebuilt 0190-73469

MKS ASTEX ASTRON FI20620-1 REMOTE PLASMA SOURCE GENERATOR #2

MKS ASTeX ASTRON2L Remote Plasma Source FI20620-1-C Rev.G rebuilt 0920-00013

MKS ASTeX ASTRON2L Remote Plasma Generator FI20620-1 Rev.D working 

NEW ASTeX 5kW 2.0 MHz Variable Source RF Generator MKS

MKS Astex AX7650 ATOMIC FLOURINE GENERATOR, OEM BOX, AMAT 0920-01120

MKS ASTeX ASTRON2L Remote Plasma Source FI20620-1 Rev.G 0920-00013 used 656hours

MKS ASTeX ASTRONe Remote Plasma Source Working

MKS ASTeX ASTRONex Remote Plasma Source FI80131 working

MKS ASTeX ASTRONex AX7685-20 Rev. A Remote Plasma Source 0190-34542 working

MKS ASTeX ASTRONex Remote Plasma Source FI80131 Rev.C working 0920-00131

MKS ASTeX ASTRON2L Remote Plasma Generator FI20620-1 Rev.D working 0920-00013

MKS Astex Reactive Astron Gas Generator Reworked

MKS ASTex AX8200F Ozone generator AX8200A-CE used

Refurbished ASTeX MKS AG1111 4.8kV power supply w/certificate

NEW MKS/Astex WG21100 Water-Cooled Dummy Load

MKS ASTeX ASTRONex FI80131 Remote Plasma Source Generator 0920-00131 Rev.D as-is

MKS ASTeX ASTRONi AX7670-06 Remote Plasma Source Rev.A 0920-00100 as-is

MKS ASTeX ASTRONex Remote Plasma Source AX7685-20 Rev.A as-is 0190-34542

Astex 1000w magnetron head with isolator and three stub tuner - mks daihen

MKS ASTex AX8200F Ozone generator used

MKS ASTeX S-1500i: 1500 Watt Microwave Power Generator

MKS ASTeX Smart Power 1.8 kW HV Microwave Power Supply: FI20161-1 or FI20160-2

MKS ASTeX ARX Microwave Control Module AMAT 0190-00398

MKS AX8500 Delivery System Astex Control Interface

MKS ASTeX Ozone Generator AX8400 Rev. T as-is

MKS Astex AGL Microwave w/Plasma D12691-R 0190-09307

MKS ASTeX SF controller ABX-X450 rev F

ASTeX ETO SSD Driver Board ARX-X267 ABX-X348 Solid State RF MKS / AMAT /Warranty

ASTEX MKS CONTROL UNIT PCB A5, X226, LIQ 34-0018-SP-02

DSCA114

DSCA121

DSDI130

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DSDX110

DSDXB001

DSMB124

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YTEA250-8