模块6DD1681-0EH1

模块6DD1681-0EH1

模块6DD1681-0EH1

模块6DD1681-0EH1

模块6DD1681-0EH1

TEL ES1805-320127-21 BASE RING INTEGRATED(SCCM-OX)

TEL ES1805-420055-11 PLATE WINDOW EPD(LLD-SE)

TEL ES1810-120660-13 UEL BODY (UNITY85PE)

TEL ES1810-121002-15 SPACER CERAMIC

TEL ES1810-121085-17 DEPO SHIELD

TEL ES1810-121190-12 ESC LOWER ELECTRODE 8N (PB-UP)

TEL ES1810-121898-13 SHIELD DEPO LOWER-Y

TEL ES1810-121899-12 PLATE EXHAUST T6 EXH-Y

TEL ES1810-220986-14 INSULATING PIPE (8K-ESC)

TEL ES1810-221024-14 UPPER COOLING PLATE

TEL ES1810-221063-14 EXHAUST RING B(8K-ESC)

TEL ES1810-221470-24 UPPER ELECTRODE (8K-180)

TEL ES1810-222811-11 INSULATOR UPPER

TEL ES1810-223289-13 SLIT EXT PLATE W1. 6P3.1 (GROUND)

TEL ES1810-223352-11 COVER WALL CHAMBER BOTTOM (GND)

TEL ES1810-223352-11 COVER WALL CHAMBER BOTTOM (GND)

TEL ES1810-224511C11 FOCUS RING 8-NW-2(8K-ESC)

TEL ES1810-225123-11 FOCUS RING

TEL ES1810-322044-11 CENTERING W/MESH (4")

TEL ES1810-322129-12 EXN RING A (8K-ESC)

TEL ES1810-323416-11 RING LABYRINTH(IPB)

TEL ES1810-323442-11 O-RING SHIELD A (IPB)(P/CGAP)

TEL ES1810-323444-11 O-RING SHIELD B (IPB) (P/C GAP)

TEL ES1810-323445-11 O-RING SHIELD B (IPB) (P/C GAP)

TEL ES1810-323465-11 HOLDER CERAMIC IEM B

TEL ES1810-323466 -11 HOLDER CERAMIC IEM C

TEL ES1810-323467-13 RF ROD(IPB)

TEL ES1810-323759-13 LIFTER X (8KI-ESC)

TEL ES1810-323760-12 LIFTER GUIDE (8KI-ESC)

TEL ES1810-323783-11 RF CONNECTOR A2 (IPB)

TEL ES1810-323897-11 RING PROTECT

TEL ES1810-324233-12 HOLDER ISOLATION GND ROD

TEL ES1810-324276-12 PIN LIFTER

TEL ES1810-324964-1 BELLOWS COVER

TEL ES1810-325059-11 PIN LIFTER ALUMINIUM

TEL ES1810-326611-11 WINDOW PLATE

TEL ES1810-327364-11 PTFE HOLDER

TEL ES1810-328005-11 COVER,PROTECT,ESC

TEL ES1810-328123-11 BELLOWS LIFTER

TEL ES1810-329064-12 WINDOW, AL-3-Y -

TEL ES1810-329078-11 COVER, SCREW A-AL-Y

TEL ES1810-329079-11 COVER, SCREW B - AL

TEL ES1810-424823-12 FEED TERMINAL

TEL ES1810-424835-12 SPRING B(ESC-3)

TEL ES1810-424945-16 SUPPORT GUIDE (8K-ESC)

TEL ES1810-424947-12 LIFTER SUPPORT (8K-ESC)

TEL ES1810-424955-11 RF ROD

TEL ES1810-425089-11 LIFTER STOPPER A (8K-ESC)

TEL ES1810-426215-11 TEFLON CAP B

TEL ES1810-426886-11 SCREW LIFTER (8KI-ESC)

TEL ES1810-426982-12 TEFLON RING

TEL ES1810-427260-11 CAP

TEL ES1810-427469-11 SCREW BLANK

TEL ES1810-427566-12 RF CONNECTOR B2 (IPB)

TEL ES1810-427841-12 LEVER

TEL ES1810-427842-12 STOPPER

TEL ES1810-427859-12 RF BLOCK TYPE B

TEL ES1810-427905-11 BLIND RF BLOCK(INSULATOR)

TEL ES1810-428050-11 FITTING INLET GAS B

TEL ES1810-428121-11 CREW BLANK

TEL ES1810-428129-11 SHIELD WINDOW

TEL ES1810-428233-12 BAFFLE MTG SCREW M3 X 12 AH-V50

TEL ES1810-428245-12 BAFFLE MTG SCREW M3X5 AH-V50

TEL ES1810-428336-11 TERMINAL, HIGH VOLTAGE

TEL ES1810-428520-12 PIN BOTTOM ELECTRODE SIDE WALL (0.5DIA)

TEL ES1810-428715-12 CAP ALUMINIUM 2

TEL ES1810-428806-11 UV CUT FILM (VIEW PORT)

TEL ES1810-428943-11 SUPPORT LIFTER 4 (IPB)

TEL ES1810-429126-11 GAS LINE P/C-2-UP (IPU)

TEL ES1810-429138-11 H CONNECTION TUNE (UP)(IPB)

TEL ES1810-429291-11 PIPE GAS HE

TEL ES1810-429649-11 PUSHER LIFTER (PTFE) 3

TEL ES1810-429707-12 UPPER ARM WIRE 180316 NYLON

TEL ES1810-429708-11 WIRE FOR ROBOT ARM

TEL ES1810-429709-11 WIRE FOR ROBOT ARM

TEL ES1810-430038-11 PLATE HOT BUSSBAR(RF)

TEL ES1810-430333-12 PIN FOR NEW UPPER COOLING BODY

TEL ES1810-431227-11 CAP C/P(MNT) For 85 SCCM UEL.

TEL ES1810-431239-11 PIN,LOCATING F/R TYPE C..S85DI.

TEL ES1880-020093-16 POWER SPLITTER

TEL ES1880-020094-15 MATCHER, MFM-20SA2

TEL ES1880-020100-12 BALL SCREW GZ1504ES-ZAPR-0211*0166

TEL ES1880-020101-12 BALL SCREW GZ1504ES-ZAPR-0191*0116

TEL ES1880-027197-11 AIR CYLINDER CDJ2B16DA-E5161

TEL ES1880-027247-12 BALL SCREW W1502-215X-C5T6

TEL ES1880-027248-12 BALL SCREW W1502-216X-C5T6

TEL ES1880-027504-11 AIR CLYINDER UC2-40-40-B2

TEL ES1881-022002-19 PCB SYSTEM I/O 2 (ATM/MAIN SUB 06&07)

TEL ES1881-022004-1C PCB EPD MONITOR BOARD (MAINTE CTLER)

TEL ES1881-022005-52 PCB EXT UNIT INTCON BOARD (DTM)

TEL ES1881-022006-13 PCB VAC INTCON BOARD

TEL ES1881-022018-17 PCB U/C IF BOARD(MAINTE CTLER)

TEL ES1881-022019-14 PCB REPEATER BOARD

TEL ES1881-022047-56 PCB VAC CONTROL BOARD 2 IEM I/L (L/L1)

TEL ES1881-022047-57 PCB VAC CONTROL BOARD 2 IEM I/L (L/L1)

TEL ES1881-022047-72 PCB VACUUM CONTROL BOARD 2

TEL ES1881-022048-11 PCB CHAM INTCON BOARD 2 (E/S)

TEL ES1881-022060-26 PCB EPD MONITOR BOARD 2(ESC)

TEL ES1881-022071-21 PCB AC DIST BOARD (HAS)

TEL ES1881-022075-11 PCB AGV MODE SW INTCON BOARD(ATM)

TEL ES1881-022118-28 PCB TSBC-V30B(SUB1)K8 (ATM/MAIN SUB 01)

TEL ES1881-022126-12 PCB CHAM INTCON BOARD 3 (P/C)

TEL ES1881-022132-21 PCB ANALOG MONITOR BOARD UTN(TMP)

TEL ES1881-022135-41 PCB OPERATOR IF BOARD 2 IEM (ATM/OPER IF)

TEL ES1881-022136-11 PCB OPE-PANE RELAY BOARD 3(MAINTE CTLER)

TEL ES1881-022137-11 PCB OPE-PANE RELAY BOARD 3(I/L)

TEL ES1881-022141-12 PCB RF CONTROL BOARD 4 (RF RACK)

TEL ES1881-022142-11 PCB GAS IF BOARD(HE2)

TEL ES1885-021882-12 P/C SHIELD RING

TEL ES1886-455163-13 INDEXER ENCODER

TEL ES1886-455164-12 INDEXER WATER SENSOR(LASER)

TEL ES1886-455164-13 INDEXER WATER SENSOR (LASER)

TEL ES1886-455165-12 INDEXER WATER SENSOR(PHOTO DIODE)

TEL ES1886-455165-13 INDEXER WATER SENSOR (PHOTO DIODE)

TEL ES1886-455221-12 P/C WALL PT SENSOR

TEL ES1886-455291-11 CHUCK MOTOR ASSEMBLY

TEL ES1886-455292-11 MOTER (P/A TWEEZERS)

TEL ES1886-455294-1 MOTOR (P/A)

TEL ES1886-455441-11 RF CABLE

TEL ES1886-456363-12 ROTARY MOTOR AND ENCODER

TEL ES1886-456364-12 EXTENDER MOTOR AND ENCODER

TEL ES1886-457617-17 RF CABLE 10M (ES1D86-008352-12)

TEL ES1886-458247-11 HAM LIFTER CYLINDER (ESC) ASSY

TEL ES1886-461134-13 RF GENERATOR-MFG-20A1

TEL ES1887-421988-11 GATE VALVE ASSEMBLY (IEM POLY)

TEL ES1A80-1016700-11 SERVICE BOX, Z-610PC-BNNN

TEL ES1D0-311007-12 TENSIONER GAP A1

TEL ES1D02-400026-11 SPROCKET DRIVE

TEL ES1D02-400026-11 SPROCKET DRIVE

TEL ES1D02-400215-11 SHIELD SPIRAL U-CHAM (S-DT)

TEL ES1D02-400262-11 SCREW BEARING

TEL ES1D05-200020-11 SHIELD DEPO

TEL ES1D05-200020C11 SHIELD, DEPO QU-A-3 (DRM2)

TEL ES1D05-200031-11 COVER..BAFFLE Q-L3(DRM2)

TEL ES1D05-300038-14 SHIELD DEPO DRM2

TEL ES1D05-300053-14 RING INSULATER B2 (DRM2)

TEL ES1D05-300083C13 PLATE UPPER QB FLAT

TEL ES1D05-300152-11 COVER..BAFFLE,Q-L,(DRM2)

TEL ES1D05-300152C11 COVER,BAFFLE,CESC

TEL ES1D05-300161-11 SHIELD, SUPPORT DEPO Q-S1

TEL ES1D05-300161C11 SHIELD,SUPPORT,DEPO,CESC

TEL ES1D05-300162C11 RING, FOCUS

TEL ES1D05-400022-14 WINDOW SHIELD DEPO DRM2

TEL ES1D05-400022C14 WINDOW SHIELD DEPO(DRM2)

TEL ES1D05-400028-11 WINDOW, UP A-2 (DRM)

TEL ES1D10-090515-TM COVER BELLOW A CE-Y FOR CE RAMIC

TEL ES1D10-100386-11 INSULATOR, BOTTOM P

TEL ES1D10-100670-13 ELECTRODE UPPER QB FLAT

TEL ES1D10-100907-12 BAFFLE PLATE

TEL ES1D10-100915-11 ELECTRODE UPPER QB. FLAT

TEL ES1D10-100938-12 RF PLATE,PC1 (DRM2)

TEL ES1D10-101111-11 RF PLATE,PC2 (DRM2)

TEL ES1D10-101446-22 PLATE,BAFFLE 0-12(DRM2)

TEL ES1D10-1014746-22 PLATE BAFFLE 0-12 (D RM2 )

TEL ES1D10-190272-TM COOLANT PIPE

TEL ES1D10-190477-TM BASE,DEPO SHIELD SUPPORT, E

TEL ES1D10-200705-14 UPPER, ELECTRODE, 1, (DRM2)

TEL ES1D10-200733-11 RING, SHIELD (DRM2)

TEL ES1D10-200921-12 DEPO SHIELD

TEL ES1D10-201429-15 UPPER,ELECTRODE R-1

TEL ES1D10-201588-12 UPPER ELECTRODE P (DRM2)

TEL ES1D10-201595-15 SHIELD, DEPOT 85L DRM2

TEL ES1D10-202177-12 UPPER ELECTRODE

TEL ES1D10-203753-12 RING, CENTERING-Y

TEL ES1D10-204310C11 200MM UPPER ELECTRODE MODIFIED

TEL ES1D10-301452-12 HOLDER,BEARING,(DRM2)

TEL ES1D10-302057-11 JIG, GAP (DRM2)

TEL ES1D10-302569-13 BRACKET..SLIDE,R,(DRM2)

TEL ES1D10-302586-12 COVER BELLOWS B

TEL ES1D10-302600-11 SUPPORT S-PIPE

TEL ES1D10-302869-11 PUSHER PIN

TEL ES1D10-302936-11 SHAFT RF INLET

TEL ES1D10-303014-12 SUPPORT SHIELD DEPO DRM2

TEL ES1D10-303124-16 DEPO SHIELD

TEL ES1D10-303124-M1 SHIELD, DEP

TEL ES1D10-303356-11 CASSETTE CHAMBER VACUUM PIPE

TEL ES1D10-303367-14 PIPE, TEE

TEL ES1D10-304039-11 FLEXLINE, HE/VAC

TEL ES1D10-305152-11 COVER , SCREW  TEFLON

TEL ES1D10-305523-12 PIPE HE-IEM-UP

TEL ES1D10-305996-11 IPE..HE1-8

TEL ES1D10-306221-13 JIG RING, 2 (DRM2)

TEL ES1D10-306628-11 WINDOW DEPO DRM2

TEL ES1D10-308722-11 RING, FOCUS, SEASONED

TEL ES1D10-311007-12 TENSIONER GAP A1

TEL ES1D10-311008-11 TENSIONER GAP B1

TEL ES1D10-311117-12 PIPE PN2-CC-3

TEL ES1D10-311258-11 COVER,BEL-L(C-ESC)

TEL ES1D10-311259-11 COVER,BEL-S,(C-ESC)

TEL ES1D10-311259-11 COVER,BEL-S,(C-ESC)

TEL ES1D10-311745-13 RING, BELLOWS UPPER

TEL ES1D10-311758-11 RING, BELLOWS LOWER

TEL ES1D10-312197 RING, FOCUS, (C-ESC 4.0MM SIC)

TEL ES1D10-312197-11 RING, FOCUS, (C-ESC 4.0MM SIC)

TEL ES1D10-312204-11 RING, FOCUS, (C-ESC 3.4MM SIC)

TEL ES1D10-313045-11 RING..F-8S-GC-260-3.2

TEL ES1D10-314780-12 RING BELLOW ME CHAMBER

TEL ES1D10-390020-TM GASKET

TEL ES1D10-390510-TM WINDOW,UPPER WALL EPD

TEL ES1D10-390540-TM PLUG DEPO SHIELD FOR CERAM IC

TEL ES1D10-390908-TM LIFTER T-HANDLE

TEL ES1D10-401239-11 SHAFT DRIV FOR CHAIN

TEL ES1D10-401722-11 COVER,ESC

TEL ES1D10-402032-11 BUSH P-PIN

TEL ES1D10-402033-11 SUPPORT BUSH

TEL ES1D10-402043-11 SUPPORT S-PIPE

TEL ES1D10-402047-11 BUSH..PIPE,COOLING,(DRM2)

TEL ES1D10-404150-11 SLEEVE, A DRM2 E

TEL ES1D10-404281-12 PIPE UEL A (DRM2)

TEL ES1D10-404854-11 GUIDE, CE-ESC, DRM2C (PACK OF 10)

TEL ES1D10-405369-11 BASE IDLE A

TEL ES1D10-405373-12 COLLAR C-1(DRM2)

TEL ES1D10-406875-11 PIN SUPPORT Q-S1(DRM2)

TEL ES1D10-406876-11 PIN SUPPORT Q-S2(DRM2)

TEL ES1D10-407211-11 SHEET SUPPORT-125(DRM2)

TEL ES1D10-407410-11 COLLAR D-2

TEL ES1D1805-320140-11 COVER, RING INNER TEL SCCM -

TEL ES1D80-000626-1X APC BOARD

TEL ES1D80-000700-11 EPD,FIBER

TEL ES1D80-000999-11 PUSH MOTOR DRIVER

TEL ES1D80-001025-11 NESLAB COOLING TYPE CHILLER

TEL ES1D80-001878-12 LEN EPD TYPE2

TEL ES1D80-002077-12 XFR SYS..BC930197 SRC2/014

TEL ES1D80-002201-12 XFR SYS RELAY BOX

TEL ES1D80-002331-12 GATE VALVE

TEL ES1D80-002332-12 VALVE GATE

TEL ES1D80-002336-12 VALVE GATE

TEL ES1D80-002751-11 ANGLE VALVE, XLA-40-X519

TEL ES1D80-002787-12 BA GAUGE LEYBOLD ITR100-T

TEL ES1D80-002858-11 ENDPOINT CABLE

TEL ES1D80-002917-11 BREAK FILTER

TEL ES1D80-003560-11 REGULATOR

TEL ES1D80-004121-25 MATCHER,,AMN-30C11

TEL ES1D81-000049-13 PCB PRESSURE SWITCH I/F BOARD

TEL ES1D81-000065-27 PCB AC POW FAIL DET BOARD B

TEL ES1D81-000088-11 PCB ASSEMBLY TV B0008-1/VMIF

TEL ES1D81-000092-16 PCB ASSEMBLY TYB121-1/COM

TEL ES1D81-000097-A5 PCB ASSEMBLY TYB212-A/FR

TEL ES1D81-000098-B2 PCB ASSEMBLY TYB 112-BDIO

TEL ES1D81-000098-B4 BRD, ASSY, TYB112-B/DIO

TEL ES1D81-000098-B8 PCB, TYB-111B/DIO