Millipore CPOKN3489A Pendant Controller
Brooks 7100-17 Transfer Robot
SVG 99-38150-02 Shuttle IES Arm 9003 Lithography Step and Scan
SVG Lithography MueTec Full Tilt Station KH-1 Step and Scan System
SVG 99-38150-02 Shuttle IES Arm 9003 Lithography with Horizontal Guide
Maxon 44.025.000-00.09-130 Motor 06-49349-01
Maxon Motor 44.060.000-00.09-071 Shuttle Motor
SVG Lithography Systems 8790317006 Light Filter Rev. A
SVG PLC A121208 Programmable Logic Controller Lithography Step and Scan
SVG Lithography 879-0427-001 Robot Rev. E
TEL 3010-201275-V1 Shutter 300mm needs recoat
TEL ESC Blank Off
TEL Sealing Plate
TEL 3D10-150823-11 Plate Cooling Inner Si-Cel R&D
TEL CT5080-92512-11 TOOL(Z) IRAM XY-P5951
TEL 3D10-202373-V1 Lower Insulator MASP
TEL Protection Ring clear
TEL 3D10-251155-V1 Focus Ring 360-302-C
Eaton 453282 PDB Interface Board PCB Rev. E
TEL 3D10-251336-V1 Focus Ring(T4)
TEL ES3D10-290050-V3 Bottom Ring Cover TEL Telius Cleaned Once
TEL 1B80-002397-11 REG CN Circuit Board MDK-794V-0
TEL 930V3-R Monopolar Ceramic 300mm Process Kit (part refurbished copper only)
TEL TDK HA-012 DC/DC Conversion Board DC/DC CONV #02
TEL HTE-TA6-E-11 AC Control Board #006
TEL 3D05-250273-11 Sandwich Insulator F SPO. R&D
TEL 3D10-251416-V1 Electrode Outer Cover R&D
TEL 3D10-150611-11 Cooling Outer Plate R-I R&D
TEL 2610-100723-V1 Exhaust Ring PM Y BEL
TEL OYDK-059 Circuit Board IO CHEM #02
TEL 1B80-002389-11 PCB DI80D080 DN BOARD Assembly
TEL 1B80-002394-11 PCB Assembly 1B80-002389-11
TEL 3D10-251415-V1 ESC Electrode Inner Cover R&D
TEL Protection Ring cloudy
Hugle Electronics 510TS Ionizing Bar TEL PR300Z
TEL ES3D10-290051-V4 Cover Wall Ring TEL Telius cleaned
TEL 3010-150797-11 Shutter Depo
TEL MPC-T0070A-14 Circuit Board IO MTR #04A TOB1106A
TEL 3D81-000031-V3 PCB Assembly TYB62A-1/VCONT
TEL 3Z10-302758-V1 Pipe L8A C-Gas Inject
TEL OYDK-020 Circuit Board CNTR EXT CHEM #01 MDK-TM94V-0
TEL 3D05-350193-11 ESC Enclosure Insulator BTM
TEL 3D05-350190-11 ESC Enclosure MID Insulator
Digital UF-EXX01-TEL1 Extender Unit TEL PR300Z
TEL 3D10-250834-V1 CEL, OX T10-75-C912
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