Celerity FC-260V-4V SiH2Cl2 750sccm Mass Flow Contr
ASM PN: 3751937-01 Cover-Lamp Ends-Lower-RH
ASM 1003-987-01 Line-OW-Highflow-Dual Valves
VAT 07512-UA24-ADA1 L-VAT Aluminum Transfer Door Va
ASM PN: 16-320319B01 Refl-D-Air Baffle-PCE Reflecto
Omron G3PA-220B-VD 20A 24-240VAC Solid State Relay,
ASM PN: 16-183851D01 Pad-End Effector-Vespel-Front
ASM PN: 16-188889D01 Cover-Lamp Ends-Lower-RH
ASM PN: 1025-241-02 Cable Assembly, ASSY-CA SCR BRI
ASM PN: 04-336307-02 Retrofit Kit RFK-77-106650A10
MKS DMA12TCEEANN633 100 Torr i-Baratron Pressure Tr
Horiba-STEC SEC-4600M H2 150 SLM Mass Flow Controll
Swagelok 6LV-DF13402P-O 2-Way High-Flow Diaphragm V
Asyst PN: 15332-002 486 Controller Board, ASM PN: 9
Motortronics CSD-410-N Variable Frequency AC Motor
Asyst PN: 9700-6209-01 Power Supply Distribution Bo
ASM PN: 02-329265D01 Assy-Cass-A/S High Temp-150MM
Huntington AOO-1545 Inline Pneumatic Valve ISO 3" A
MKS 4515-0123 Straight HTR1.5 STR8.0 71W Heater Jac
ASM PN: 04-328353A01 Qualiflow Pneumatic NO Hi-Flow
ASM PN: 04-328353A02 Qualiflow F Pneumatic NC Hi-Fl
26 Crystar ASM 5" (125 mm) Wafer Silicon Carbide 52-Slo
Horiba STEC SEC-Z12DWM H2 30 slm Mass Flow Controll
ASM PN: 16-320637C01 Refl-D-Light Dam-Diffused-Fron
VAT 26328-KA11-0001 HV Angle ISO-KF25 Vacuum Valve,
ASM PN: 04-188653-01 Kit-Reactor Gate Valve Intlk-P
ASM PN: 77-123776A36 Sensor-UV 24VDC Digital Output
Celerity Unit UFC-1660 20 SLM HCl Mass Flow Control
4: Swagelok SS-4-HVCR-1SR Female High-Flow VCR Nut
ASM 16-337034-01 Line-OW-H2-SC to G/P W/MB AUX4-RH
Qualiflow AFC 261 O2 10 slm Mass Flow Controller MF
ASM PN:56-106565A34 Heater-1.5 IN Dia, 200 VAC, 30
Qty. 5: ASM PN: C000060A Hex Nut M12 DIN 934, A4-80
ASM PN: 77-106768A96 Sensor-H2 0-1000 PPM PureAire
Kytola SLM3-GC45-GP Sealing Liquid Flow Meter, ASM
Tescom 31-1A66AALD4LD4Z UHP Manual Diaphragm Valve,
MKS 9620-1520 Inline 2.0 DIA 200VAC 141W Heater Jac
MKS 9515-0754 HTR1.5 EL90LR TAN 35W/24W Heater Jack
ASM PN: 3752453-01 Shield-PCE Bottom Side-300MM (30
ASM PN:51-122919A27 Flange Str SS NW TO NW25 x 3.94
Horiba STEC SEC-Z12DWM N2 20 slm Mass Flow Controll
Horiba STEC SEC-4500MO H2 20 slm Mass Flow Controll
Swagelok 6LVV-MSM-ALD3ET-W3-P-CSL ALD Diaphragm Val
Swagelok 6LVV-MSM-ALD3ET-W2-P-CSL ALD Diaphragm Val
Swagelok 6LVV-MSM-ALD3ET-W3-P-CSL ALD Diaphragm Val
Tescom .20 MPa 30 PSIG Pressure Regulator, ASM PN:
ASM PN: 3553612-01 Kit-Retro-Flame Arrestor (Retrof
ASM PN: 16-141650-01 Line-OW-Rotameter Bypass
ASM PN: 1002-312-01 FR10/80 M5.7/75D Black Viton O-
ASM PN: 60-122483A04 20.75 ID x .21 W Black Vulcani
SMC VQ1200NY-5-X35 24 VDC Solenoid Valve, ASM PN: 5
ASM PN: 56-106565A37 Heater-1.5 IN Dia, 200 VAC, 40
Qty. 15: ASM PN: 60-122291A46 2-276/75D Black Viton
Qualiflow AFC 260 NF3 500 sccm Mass Flow Controller
Brooks 002-4037-04 PowerPak Battery Back Up Unit
ASM PN: 54-106931A67 Controller-Assy-Dual Board-Int
Qualiflow AFC 260 H2 5 slm Mass Flow Controller MFC
Mykrolis PSPBD2B1/ASM 54-125027A04 Mass Flow Controller
MKS LPJ1-40-IK-CLHXXX Inline Isolation NW40 Vacuum
ASM PN: 02-400588-01 NW40 NW-40 Seal/Centering Ring
IMFEC12
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