对变频器的输出参数进行测量时也要特别注意。由于变频器的输出为PWM波形，含有高次谐波，而电动机转矩主要依赖于基波电压有效值，故测量输出电压时，主要是测量基波电压值，使用整流式电压表，其测量结果接近数字频谱分析仪测量值，而且与变频器的输出频率有的线性关系。若需进一步提高测量精度，可以采用阻容滤波器。数字万用表容易受干扰，测量有较大的误差。输出电流需要测量包括基波和其他高次谐波在内的总有效值，因此常用的仪表是动圈式电流表（在电动机负载时，基波电流有效值和总电流有效值差别不大）。当考虑到测量方便而采用电流互感器时，在低频情况下电流互感器可能饱和，所以，选择适当容量的电流互感器。
Edwards U20000925 iNIM Network Interface D37310000
Granville-Phill?ips 20347057 Stabil-Ion Gauge Module Rev. 00
Granville-Phill?ips 330001 Ionization Gauge Controller Model 330
Inficon VIP040-Z Heated Inline Valve LI-9469 Balzers AMAT 0190-33740
Edwards W65531611 Barocel Pressure Sensor 100 Torr Tested
Edwards W65521611 Barocel Pressure Sensor 10 Torr Transducer Tested
Edwards W65511611 Barocel Pressure Sensor 1 Torr Transducer Tested
Edwards U20000923 iNIM Network Interface D37310000
Fuji Electric VFC304A-7W Ring Compressor
Granville-Phill?ips 275821 Differential Output Amplifier Lot of 4
Granville-Phill?ips 352001 Gauge Controller Series 352 Rev. 13
CTI-Cryogenics Controller 8188002G001
Inficon Capacitance Diaphragm Gauge CR091D
Oerlikon Leybold Pump Seal Kit 419468 Lot of 2 WA WAU 1001
Leybold 684-046750-004 MagPower Cable A215300-020-C2D Adixen AMAT 0620-05850
Mass-Vac 355084 MV Multi-Trap Vacuum AMAT 0190-34121 with Heater Jacket
V-Tex IRF-03055-2-01 Rollcam Slit Valve
Edwards U20000922 iNIM Network Interface D37310000
Edwards U200001023 Interface Cable 5 Way 4M
Edwards U20000924 iNIM Network Interface D37310000
Mass-Vac 355084 MV Multi-Trap Particle Trap Water Cooled 0190-33338
Compact Air Products Air Cylinder R34X12 Lot of 16
Entegris 4210L-003G-F06-?A00-A NT Pressure Transducer Surplus
NT International 4210-100G-F06-D?06-A-P2-S2 NT Pressure Transducer 70961-50
Entegris 4210-100G-F04-B?06-B-P2-U1 NT Pressure Transducer Surplus
Inficon SKY Capacitance Diaphragm Gauge CR091D
Edwards D37237000 Pump Display Terminal Controller Tested
Edwards A52844460 im Interface Module
Granville-Phill?ips Convectron Gauge Cables 113084001
Edwards D37280700 Pump Display Terminal Controller Tested
Marathon Electric EVJ 56T34F5304J P Electric Motor 15713-M Tech-Mag Motor Head
Edwards B90002011 Pneumatic Gate Valve ADVU/HGL-40-67-?P-A-V-SA
SMC XLD-40 Pneumatic High Vacuum Valve
CKD N4S0-T50 14 Port Pneumatic Manifold N4S030 Solenoid Valve Lot of 5
Setra 328GL3ADZNSAM3 Micro Pressure Transducer Sensor Display Lot of 18
Entegris 4100-150G-F02-A?00-A-P1-U1-3C06 Pressure Transducer
Vacuum Research 94579-101-V Pneumatic Gate Valve
Harting Han-K4/2F Vacuum Pump Cable K4/2M Lot of 3
Edwards NRY0TN101US Eason Control Box Module Alarm Enclosure Rev. D
Edwards NRY0DN101US Eason Control Box Module Alarm Enclosure Rev. G
Edwards NGU078000P Vacuum Pump Switch Box Enclosure 6XPDM
Edwards NRY0TN101US Eason Control Box Module Alarm Enclosure Rev. M
Piab MLD 200 Vacuum Pump
Edwards D02187000 Active Pirani Gauge AMAT 3310-01198
Edwards D02185000 Active Pirani Gauge APG-MP-NW16 ST-ST
Comet CVUN-1500AC/4-J?HJA-Z1 Vacuum Capacitor
SMC IR1010-01-M Precision Regulator Assembly Lot of 3
Setra 2231100PAEB2CD1?M Pressure Transducer AMAT 1350-00490
MKS Instruments 51A-21440 Baratron Pressure Switch Lot of 2
Tylan General Capacitance Diaphragm Gauge CMLA-21 LAM 4420 853-017643-003 Rev. D
Millipore Capacitance Diaphragm Gauge CMLA-21 LAM 4420 853-017643-003 Rev. H
Granville-Phill?ips 275112-1 275 Convectron Gauge
HVA 21251-1003Z-001 Pneumatic Gate Valve Actuator
Granville-Phill?ips 275 Differential Output Amplifier Lot of 5
Edwards U20000347 im Interface Module
MKS Instruments DPCA-26028 Dual-Zone Pressure Controller Type DPC
Ulvac Sinku Kiko G-100DC Rotary Vane Vacuum Pump Tested Not
Edwards D02177000 Active Pirani Gauge APG-L-NW16 ST/ST
Edwards D05914000 Vacuum Interlock Switch IS16K
SMC ITV2011-31N3N4-?X95 E/P Pressure Regulator Lot of 6
SMC PF2W720T-04-27 Digital Flow Switch INA-24-73-04 Valve AMAT 0190-13951
Tokyo Keiso SFC-720-10 Ultrasonic Flow Meter Lot of 2
Tokyo Keiso SFC-720-20 Ultrasonic Flow Meter Lot of 2
Alcatel P0194P1 PCB P0194E1
Anelva Ionization Gauge MIG-072S
Inficon 0190-26769 Ion Universal Gauge BPG400 AMAT
Inficon 0190-26328 Ion Universal Gauge BPG400 AMAT
Granville-Phill?ips 390766-3-YG-T Micro-Ion ATM Module
Granville-Phill?ips 390727-2-YK-T Micro-Ion ATM Module Conflat
Granville-Phill?ips 390727-2-YK-T Micro-Ion ATM Module
Inficon 0190-19964 Foreline Heated Extended Bellows AMAT
Edwards A52844463 im Interface Module
Edwards A52844463 iQ Interface Module
Edwards U20000616 Shutdown Interface Box DWG# C4560-1
Edwards 3XIH600/3XIL70 Interface Unit GI
Granville-Phill?ips 275806-EU Mini-Convectron Module Lot of 2
CKD N4S0-T56 15-Port Pnuematic Manifold OPP3-1H Lot of 2
CKD N4S0-T30R 8-Port Pneumatic Manifold N3S010 Solenoid Valve Lot of 4
Leybold 72142059-B Dual Digital Run And Process Timer
Leybold 72142056 Digital Temperature Gauge
Leybold 72142057-C Digital Temperature Gauge
AMAT Applied Materials 0190-27313 Capacitance Pirani Gauge
Inficon 390-010 Capacitance Diaphragm Gauge CDG100D 10 Torr
Edwards NGR409000 im Interface Module DeviceNet with AIM
Schumacher CFAC Pneumatic Controller 10-0415
Shimadzu 263-11761-03 Turbopump Power Cable AMAT 0620-00249
Granville-Phill?ips Stabil-Ion Gauge Cable 352002-3
Rietschle Thomas A2688VEF22 Vacuum Pump 2688 Series
Varian 0401-K6820-301 EVAC 200 Vacuum Pump As-Is
Edwards NRY00T0000 VFB Purge Box P126X
Emerson Bristol Babcock 506008-649 Pressure Switch Lot of 3
Edwards D37420000 Local Control Module iTIM
Alcatel 1004AC Vacuum Pump 1102685402 untested as-is
Opal 70512350000 Vacuum Controller STC Assembly
Granville-Phill?ips 20275508 275 Mini-Convectron Module Lot of 2
PIAB M100B6CEV Vacuum Pump Air Analyzer AMAT 3620-00564
Entegris 4100-060G-F04-B?12-B-P2-U1 NT Single-Port Pressure Transducer Lot of 2
Harting Han-K4/2F Vacuum Pump Cable Lot of 3
Granville-Phill?ips 352001 Gauge Controller Series 352 Cable 013683
Schumacher Pneumatic Controller CFAC 0190-15779
SMC XLA-160DA-F9BA High Vacuum Valve Assembly
Omega PX154-025DI Pressure Transducer AMAT 1220-00044 Lot of 3
Magnetek 8-182687-01 Century AC Motor Jet Pump
Inficon 3CD1-F5E-230B Capacitance Diaphragm Gauge CDG100D Tested
CTI-Cryogenics 8113093G001 GOLDLink Support Controller
Inficon 371-050 Capacitance Diaphragm Gauge CDG100-A AMAT 1350-00097
SMC NZL112-G Multistage Ejector Lot of 3
Sanso Electric PV2-6/6-BTBSC2 Wet Pit Type Centrifugal Pump
Sanso Electric PV2-4/1-BTBSC2 Wet Pit Type Centrifugal Pump
Emerson 979450 Commercial Duty Pump Motor C63CXJBH-5252 Lot of 2 Untested As-Is
Edwards NRY0DN101US Control Box Module Alarm Enclosure Rev. J
Edwards NRY0DN101US Control Box Module Alarm Enclosure Rev. K
Edwards NRY0P8101 Eason Control Box Module Alarm Enclosure
Setra 223 Pressure Transducer 223G100PAEB2CD1?M 1350-00490
Toyota 0620-03388 T1000 Dry Vacuum Pump 5 Meter Cable Assembly
Inficon SKY Capacitance Diaphragm Gauge CDG100
Granville-Phill?ips Ion Gauge Cable 0360161
Hoffman A-12N126 Vacuum Pump Power Supply Ebara 213681
Setra Pressure Transducer 2251250PCC411B1
Setra Pressure Transducer 225110CPCC411B1
Leybold 844230/004 CoolVac System Controller
Sumitomo 0190-27302 Cryo Return Flexible Hose AMAT 25A x 15m
Signet Ionization Gauge 37-5319 1"
Granville-Phill?ips 352019 Gauge Controller Series 352 Rev. A
CTI-Cryogenics 8113160G001 On-Board Cryopump P300 Module As-Is
CTI Cryogenics On-Board Cryopump P300 Module 8113192G001
Granville-Phill?ips 20352001 Gauge Controller 112 Series 352
Granville-Phill?ips 352001 Gauge Controller Series 352 Rev. 12
Sanwa Denki Vacuum Switch SVS-1S SVS-1 Lot of 10
Granville-Phill?ips 352001 Gauge Controller Series 352 Rev. 13
Ametek Pressure Transducer 100SV3000SM41B3 3000PSIG
Leybold 200 80 513 DRYVAC System Remote Controller M100S
Alcatel Control Board PCB P0176-D
Horiba STEC SEC-V110DM Digital Mass Flow Controller AMAT 3030-14383 Lot of 2
Horiba STEC SEC-4400M Mass Flow Controller Lot of 2 As-Is
MKS Instruments 1159B-02000RV-S Mass Flow Controller 2000 SCCM AR Lot of 2 As-Is
Celerity BBYLUA00 Mass Flow Controller IN3XP AMAT 3030-15193 Untested
Celerity AAPGD40W1 Mass Flow Controller IN3XP AMAT 0190-19977 CH2F2 Lot of 2
Setra 223 Pressure Transducer 223G025PABW2CD1?M 1350-00492
Duniway I-100-NC Coated Ion Gauge Tube
Granville-Phill?ips 20275508 275 Mini-Convectron Module
CTI-Cryogenics 8112099G009 15m On-Board Power Cable
CTI-Cryogenics 8113211G001 Goldlink With USB Support
Alnor AirGard 385 Fume Hood Monitor
Alnor AirGard 200 Fume Hood Monitor
Granville-Phill?ips 275998 275 Mini-Convectron Module
STS System Total Solutions MGV50-D5-0030 Throttle Control Valve
Granville-Phill?ips 20275998 275 Mini-Convectron Module
Granville-Phill?ips 275591 275 Mini-Convectron Module
Granville-Phill?ips 275876-EU 275 Mini-Convectron Module
Granville-Phill?ips 20275508 275 Mini-Convctron Gauge
SMC LVR50-Z19N-X14 Teflon Regulator Pneumatic Valve
Granville-Phill?ips 275801-EU 275 Mini-Convectron Module
UE Precision Sensors 4861-65-GA-RM Pressure Transducer Lot of 8
Granville-Phill?ips 275546-EU 275 Mini-Convectron Module
CKD OPP3-1H Pneumatic Manifold Assembly N4S0
Granville-Phill?ips 15142 Ion Gauge Cable AMAT 0620-99000
Proportion Air Regulator PA70905-27 Lot of 5
Edwards C41417000 Right Angle Isolation Valve PV40PKA DBL-B
MKS Instruments 41A-21439 Baratron Pressure Switch Lot of 2
Parker P1M063C/KMC6N04?6 Pneumatic Cylinder Series Double Acting
Yamamoto EMD7 D1T0D Manometer Manosys TEL CT024-014440-1 ACT12 Lot of 2
Transducers Direct TDG03DGV01501D0?01 Transducer AMAT 6000-03353
Setra 2251100PGD41106 Pressure Transducer Model 225
SMC VBAT05S1 Air Tank
Setra 2231100PABW2CD1?M Pressure Transducer 0-100 PSIA
Celerity Pressure Transducer NTT 204 TR0002342374
Celerity Pressure Transducer SS2 GFD01A3DCS
AMAT Applied Materials 802-0087-026 Turbo Pump Cable 0190-24283
MKS Instruments LPJ1-40-AK-CLZX?XX Pneumatic Angle Valve
CTI-Cryogenics EMO Assembly IS-1000 Lot of 2
Millipore Pressure Transducer NTT 204 250 PSIG
Inficon 0190-19968 Heated Right Turbo Elbow AMAT Applied Materials
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